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Proceedings Papers

ASME 2004 International Mechanical Engineering Congress and Exposition
November 13–19, 2004
Anaheim, California, USA
Conference Sponsors:
  • Microelectromechanical Systems Division
ISBN:
0-7918-4714-4
Microelectromechanical Systems

Microelectromechanical Systems

Fabrication and Packaging

General

Materials/Applied Mechanics

MEMS Testing and Characterization

Micro/Nano Devices and Systems

Microfluids and Thermal Sciences Issues in Microsystems Development

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