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J. Heat Transfer
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    Journal Articles

    Raman Thermometry Measurements and Thermal Simulations for MEMS Bridges at Pressures From 0.05 Torr to 625 Torr

    Available to Purchase
    Leslie M. Phinney, Justin R. Serrano, Edward S. Piekos, John R. Torczynski, Michael A. Gallis, Allen D. Gorby
    Journal: ASME Journal of Heat and Mass Transfer
    Publisher: ASME
    Article Type: Research Papers
    J. Heat Mass Transfer. July 2010, 132(7): 072402.
    https://doi.org/10.1115/1.4000965
    Published Online: April 28, 2010
    Abstract
    View Articletitled, Raman Thermometry Measurements and Thermal Simulations for MEMS Bridges at Pressures From 0.05 Torr to 625 Torr
    Open the PDF for Raman Thermometry Measurements and Thermal Simulations for MEMS Bridges at Pressures From 0.05 Torr to 625 Torr in another window
    Topics: Bridges (Structures), Finite element analysis, Heat transfer, Microelectromechanical systems, Pressure, Simulation, Temperature, Temperature measurement, Heat conduction, Temperature profiles
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