In this paper the transient coupled conductive-radiative field, due to a laser heat source impinging on a thin film deposited on a substrate, has been solved in the hypothesis of one dimensionality of the optical field and of two dimensionality of the thermal field. Results have been obtained with the matrix method for the optical field and the finite volume method for the thermal field. The results show that when the investigation is localized to the center of the spot, the one-dimensional model describes the thermal field quite well. Instead, if knowledge of the temperature is required elsewhere, the two-dimensional model is needed. The investigation herein presented shows that for low-conductivity materials (a–Si) the temperature peaks are placed inside the thin film for the absorption function distribution, determined by interference phenomena. [S0022-1481(00)01301-3]

1.
Grigoropoulos, C. P., 1994, “Heat Transfer in Laser Processing of Thin Films,” Annual Review of Heat Transfer, C. L. Tien, ed., CRC, Boca Raton, FL, Vol. 5, Chap. 2, pp. 77–130.
2.
Chen
,
G.
, and
Tien
,
C. L.
,
1994
, “
Thermally Induced Optical Nonlinearity During Transient Heating of Thin Films
,”
ASME J. Heat Transfer
,
116
, pp.
311
316
.
3.
Tamura
,
H.
,
Miyao
,
M.
, and
Tokuyama
,
T.
,
1979
, “
Laser-Annealing Behavior of a Phosphorus-Implanted Silicon Substrate Covered with a SiO2 Film
,”
J. Appl. Phys.
,
50
, pp.
3783
3784
.
4.
Colinge
,
J. P.
, and
Van de Viele
,
F.
,
1981
, “
Laser Light Absorption in Multilayers
,”
J. Appl. Phys.
,
52
, pp.
4769
4771
.
5.
Park
,
H. K.
,
Xu
,
X.
,
Grigoropoulos
,
C. P.
,
Do
,
N.
,
Klees
,
L.
,
Leung
,
P. T.
, and
Tam
,
A. C.
,
1993
, “
Transient Optical Transmission Measurement in Excimer-Laser Irradiation of Amorphous Silicon Films
,”
ASME J. Heat Transfer
,
115
, pp.
178
183
.
6.
Grigoropoulos
,
C. P.
,
Park
,
H. K.
, and
Xu
,
X.
,
1993
, “
Modeling of Pulsed Laser Irradiation of Thin Silicon Layers
,”
Int. J. Heat Mass Transf.
,
36
, pp.
919
924
.
7.
Mansuripur
,
M.
,
Connell
,
G. A. N.
, and
Goodman
,
J. W.
,
1982
, “
Laser-Induced Local Heating of Multilayers
,”
Appl. Opt.
,
21
, pp.
1106
1114
.
8.
Nakano
,
S.
, et al.
,
1986
, “
Laser Patterning Method for Integrated Type a–Si Solar Cell Submodules
,”
Jpn. J. Appl. Phys., Part 1
,
25
, pp.
1936
1943
.
9.
Madison
,
M. R.
, and
McDaniel
,
T. W.
,
1989
, “
Temperature Distributions Produced in an N-Layer Film Structure by Static or Scanning Laser or Electron Beam With Application to Magneto-Optical Media
,”
J. Appl. Phys.
,
66
, pp.
5738
5748
.
10.
McGahan
,
W. A.
, and
Cole
,
K. D.
,
1992
, “
Solutions of Heat Conduction Equation in Multilayers for Photothermal Deflection Experiments
,”
J. Appl. Phys.
,
72
, pp.
1362
1373
.
11.
Cole
,
K. D.
, and
McGahan
,
W. A.
,
1993
, “
Theory of Multilayers Heated by Laser Absorption
,”
ASME J. Heat Transfer
,
115
, pp.
767
771
.
12.
Knittl, Z., 1976, Optics of Thin Films, John Wiley and Sons, London, UK.
13.
Ong
,
C. K.
,
Tan
,
H. S.
, and
Sin
,
E. H.
,
1986
, “
Calculation of Melting Threshold Energies of Crystalline and Amorphous Materials due to Pulsed-Laser Irradiation
,”
Mater. Sci. Eng.
,
79
, pp.
79
85
.
14.
Kiyama
,
S.
,
Hirono
,
Y.
,
Hosokawa
,
H.
,
Moriguchi
,
T.
,
Nakano
,
S.
, and
Osumi
,
M.
,
1990
, “
Temperature Distribution Analysis in Multi-Layer Thin Film Structures by Laser Beam Irradiation
,”
Jpn. Soc. Precision Eng.
,
56
, pp.
1500
1506
.
15.
Do
,
N.
,
Klees
,
L.
,
Leung
,
P. T.
,
Tong
,
F.
,
Leung
,
W. P.
, and
Tam
,
A. C.
,
1992
, “
Temperature Dependence of Optical Constants for Amorphous Silicon
,”
Appl. Phys. Lett.
,
60
, pp.
2186
2188
.
16.
Angelucci
,
N.
,
Bianco
,
N.
, and
Manca
,
O.
,
1997
, “
Thermal Transient Analysis of Thin Film Multilayers Heated by Pulsed Laser
,”
Int. J. Heat Mass Transf.
,
40
, pp.
4487
4491
.
You do not currently have access to this content.