The room-temperature radiative properties of YBa2Cu3O7−δ superconducting films with varying oxygen content (δ = 0 to 1) on a LaAlO3 substrate are investigated. The fitting of reflectance spectra using thin-film optics and the Drude-Lorentz model function with multiple oscillators determines the optical constants. The film with high oxygen content (δ = 0) has a metallic optical behavior. A decrease in the oxygen content causes a removal of free carriers, and the film with low oxygen content (δ = 1) acts like a dielectric with a very weak free-electron contribution. Knowledge of the optical constants of oxygen-deficient YBa2Cu3O7-δ films facilitates accurate substrate temperature measurement and control during the film deposition process.

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