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Direct Simulation Monte Carlo Analysis of Rarefied Gas Flow Structures and Ventilation of Etching Gas in Magneto-Microwave Plasma Etching Reactors

J. Fluids Eng. Jun 2002, 124(2): 476-482 (7 pages)
This article has been cited by the following articles in journals that are participating in CrossRef Cited-by Linking.
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Journal of Physics D: Applied Physics. January 2016, 49(38)
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