Microfilters for collecting micron-size airborne biological agents are designed and fabricated using a micro-electro-mechanical-system (MEMS) fabrication technology. The thickness of the microfilter ranges from 1 μm–3 μm, and the hole diameter from 5 μm–12 μm. Iterations between experimental and numerical studies are carried out to attain efficient microfilter designs with low pressure drop. Two orders of magnitude reduction of viscous power consumption have been achieved. A design rule of the filter in a low Reynolds-number range was first derived from numerical simulations. Highly accurate measurements of the three-dimensional (3-D) geometry, side-wall profile, and diameter of the micron-size holes are critical in validating and modifying the design rule. The effect of the surface slip is found to be small in the tested Knudsen-number range.
Micromachined Particle Filter With Low Power Dissipation
Contributed by the Fluids Engineering Division for publication in the JOURNAL OF FLUIDS ENGINEERING. Manuscript received by the Fluids Engineering Division June 2, 2000; revised manuscript received May 20, 2001. Associate Editor L. Mondy.
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Yang, J. M., Ho, C., Yang , X., and Tai, Y. (May 20, 2001). "Micromachined Particle Filter With Low Power Dissipation ." ASME. J. Fluids Eng. December 2001; 123(4): 899–908. https://doi.org/10.1115/1.1399285
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