Manufacturing processes that can create extremely small machines have been developed in recent years. Microelectromechanical systems (MEMS) refer to devices that have characteristic length of less than 1 mm but more than 1 micron, that combine electrical and mechanical components and that are fabricated using integrated circuit batch-processing techniques. Electrostatic, magnetic, pneumatic and thermal actuators, motors, valves, gears, and tweezers of less than 100-μm size have been fabricated. These have been used as sensors for pressure, temperature, mass flow, velocity and sound, as actuators for linear and angular motions, and as simple components for complex systems such as micro-heat-engines and micro-heat-pumps. The technology is progressing at a rate that far exceeds that of our understanding of the unconventional physics involved in the operation as well as the manufacturing of those minute devices. The primary objective of this article is to critically review the status of our understanding of fluid flow phenomena particular to microdevices. In terms of applications, the paper emphasizes the use of MEMS as sensors and actuators for flow diagnosis and control.

Issue Section:
Research Papers
Topics:
Actuators, Complex systems, Engines, Flow (Dynamics), Fluid dynamics, Fluid mechanics, Gears, Heat, Integrated circuits, Machinery, Manufacturing, Microelectromechanical systems, Motors, Physics, Pressure, Pumps, Sensors, Temperature, Valves
1.
Alder
B. J.
, and
Wainwright
T. E.
,
1957
, “
Studies in Molecular Dynamics
,”
Journal of Chemical Physics
, Vol.
27
, pp.
1208
–
1209
.
2.
Alder, B. J., and Wainwright, T. E., 1958, “Molecular Dynamics by Electronic Computers,” Transport Processes in Statistical Mechanics, I. Prigogine, ed., pp. 97–131, Interscience, New York.
3.
Alder
B. J.
, and
Wainwright
T. E.
,
1970
, “
Decay of the Velocity Auto-Correlation Function
,”
Physical Review A
, Vol.
1
, pp.
18
–
21
.
4.
Allen, M. P., and Tildesley, D. J., 1987, Computer Simulation of Liquids, Clarendon Press, Oxford, England.
5.
Amato
I.
,
1998
, “
Fermenting a Revolution, in Miniature
,”
Science
, Vol.
282
, No.
5388
, 16 October, pp.
402
–
405
.
6.
Anderson
J. L.
, and
Quinn
J. A.
,
1972
, “
Ionic Mobility in Microcapillaries
,”
Journal of Chemical Physics
, Vol.
27
, pp.
1208
–
1209
.
7.
Angell
J. B.
,
Terry
S. C.
, and
Barth
P. W.
,
1983
, “
Silicon Micromechanical Devices
,”
Faraday Transactions I
, Vol.
68
, pp.
744
–
748
.
8.
Arkilic, E. B., 1997, “Measurement of the Mass Flow and Tangential Momentum Accommodation Coefficient in Silicon Micromachined Channels,” Ph.D. thesis, Massachusetts Institute of Technology, Cambridge, Massachusetts.
9.
Arkilic, E. B., Schmidt, M. A., and Breuer, K. S., 1995, “Slip Flow in Microchannels,” Rarefied Gas Dynamics 19, J. Harvey and G. Lord, eds., Oxford University Press, Oxford, United kingdom.
10.
Arkilic
E. B.
,
Schmidt
M. A.
, and
Breuer
K. S.
,
1997
a, “
Gaseous Slip Flow in Long Microchannels
,”
Journal of Microelectromechanical Systems
, Vol.
6
, pp.
167
–
178
.
11.
Arkilic, E. B., Schmidt, M. A., and Breuer, K. S., 1997b, “TMAC Measurement in Silicon Micromachined Channels,” Rarefied Gas Dynamics 20, C. Shen, ed., 6 pp., Beijing University Press, Beijing, China.
12.
Ashino
I.
, and
Yoshida
K.
,
1975
, “
Slow Motion between Eccentric Rotating Cylinders
,”
Bulletin of the JSME
, Vol.
18
, No.
117
, pp.
280
–
285
.
13.
Atwood
B. T.
, and
Schowalter
W. R.
,
1989
, “
Measurements of Slip at the Wall during Flow of High-Density Polyethylene through a Rectangular Conduit
,”
Rheologica Acta
, Vol.
28
, p.
134
–
146
.
14.
Bandyopadhyay
P. R.
,
1986
, “
Review—Mean Flow in Turbulent Boundary Layers Disturbed to Alter Skin Friction
,”
ASME JOURNAL OF FLUIDS ENGINEERING
, Vol.
108
, pp.
127
–
140
.
15.
Bart
S. F.
,
Tavrow
L. S.
,
Mehregany
M.
, and
Lang
J. H.
,
1990
, “
Microfabricated Electrohydrodynamic Pumps
,”
Sensors and Actuators A
, Vol.
21–23
, pp.
193
–
197
.
16.
Batchelor, G. K., 1967, An Introduction to Fluid Dynamics, Cambridge University Press, London, United Kingdom.
17.
Bau
H. H.
,
1994
, “
Transport Processes Associated with Micro-Devices
,”
Thermal Science and Engineering
, Vol.
2
, pp.
172
–
178
.
18.
Berkooz
G.
,
Fisher
M.
, and
Psiaki
M.
,
1993
, “
Estimation and Control of Models of the Turbulent Wall Layer
,”
Bulletin of the American Physical Society
, Vol.
38
, p.
2197
2197
.
19.
Beskok, A., 1994, “Simulation of Heat and Momentum Transfer in Complex Micro-Geometries,” M. Sc. thesis, Princeton University, Princeton, New Jersey.
20.
Beskok, A., 1996, “Simulations and Models of Gas Flows in Microgeometries,” Ph.D. thesis, Princeton University, Princeton, New Jersey.
21.
Beskok
A.
, and
Karniadakis
G. E.
,
1994
, “
Simulation of Heat and Momentum Transfer in Complex Micro-Geometries
,”
Journal of Thermophysics and Heat Transfer
, Vol.
8
, pp.
355
–
370
.
22.
Beskok, A., and Karniadakis, G. E., 1998, “A Model for Flows in Channels, Pipes and Ducts at Micro-and Nano-Scales,” Microscale Thermophysicsl Engineering, to appear.
23.
Beskok
A.
,
Karniadakis
G. E.
, and
Trimmer
W.
,
1996
, “
Rarefaction and Compressibility Effects in Gas Microflows
,”
ASME JOURNAL OF FLUIDS ENGINEERING
, Vol.
118
, pp.
448
–
456
.
24.
Bhatnagar
P. L.
,
Gross
E. P.
, and
Krook
M.
,
1954
, “
A Model for Collision Processes in Gases. 1. Small Amplitude Processes in Charged and Neutral One-Component Systems
,”
Physical Review
, Vol.
94
, pp.
511
–
524
.
25.
Bird
G. A.
,
1963
, “
Approach to Translational Equilibrium in a Rigid Sphere Gas
,”
Physics of Fluids
, Vol.
6
, pp.
1518
–
1519
.
26.
Bird
G. A.
,
1965
, “
The Velocity Distribution Function within a Shock Wave
,”
Journal of Fluid Mechanics
, Vol.
30
, pp.
479
–
487
.
27.
Bird, G. A., 1976, Molecular Gas Dynamics, Clarendon Press, Oxford, United Kingdom.
28.
Bird
G. A.
,
1978
, “
Monte Carlo Simulation of Gas Flows
,”
Annual Review of Fluid Mechanics
, Vol.
10
, pp.
11
–
31
.
29.
Bird, G. A., 1994, Molecular Gas Dynamics and the Direct Simulation of Gas Flows, Clarendon Press, Oxford, United Kingdom.
30.
Blackwelder, R. F., and Gad-el-Hak M., 1990, “Method and Apparatus for Reducing Turbulent Skin Friction,” United States Patent No. 4,932,612.
31.
Bryzek
J.
,
Peterson
K.
, and
McCulley
W.
,
1994
, “
Micromachines on the March
,”
IEEE Spectrum
, Vol.
31
, May, pp.
20
–
31
.
32.
Brunauer, S., 1944, Physical Adsorption of Gases and Vapours, Oxford University Press, Oxford, United Kingdom.
33.
Busch-Vishniac
I. J.
,
1998
, “
Trends in Electromechanical Transduction
,”
Physics Today
, Vol.
51
, July, pp.
28
–
34
.
34.
Cantwell
B. J.
,
1981
, “
Organized Motion in Turbulent Flow
,”
Annual Review of Fluid Mechanics
, Vol.
13
, pp.
457
–
515
.
35.
Carlson
H. A.
, and
Lumley
J. L.
,
1996
, “
Flow over an Obstacle Emerging from the Wall of a Channel
,”
AIAA Journal
, Vol.
34
, pp.
924
–
931
.
36.
Cercignani, C., 1988, The Boltzmann Equation and Its Applications, Springer-Verlag, Berlin.
37.
Chan
D. Y. C.
, and
Horn
R. G.
,
1985
, “
Drainage of Thin Liquid Films
,”
Journal of Chemical Physics
, Vol.
83
, pp.
5311
–
5324
.
38.
Chapman, S., and Cowling, T. G., 1970, The Mathematical Theory of Non-Uniform Gases, Third Edition, Cambridge University Press, London, United Kingdom.
39.
Cheng
H. K.
,
1993
, “
Perspectives on Hypersonic Viscous Flow Research
,”
Annual Review of Fluid Mechanics
, Vol.
25
, pp.
455
–
484
.
40.
Cheng
H. K.
, and
Emmanuel
G.
,
1995
, “
Perspectives on Hypersonic Nonequilibrium Flow
,”
AIAA Journal
, Vol.
33
, pp.
385
–
400
.
41.
Choi, H., Moin, P., and Kim, J., 1992, “Turbulent Drag Reduction: Studies of Feedback Control and Flow Over Riblets,” Department of Mechanical Engineering Report No. TF-55, Stanford University, Stanford, CA.
42.
Choi
H.
,
Moin
P.
, and
Kim
J.
,
1994
, “
Active Turbulence Control for Drag Reduction in Wall-Bounded Flows
,”
Journal of Fluid Mechanics
, Vol.
262
, pp.
75
–
110
.
43.
Ciccotti, G., and Hoover, W. G. (editors), 1986, Molecular Dynamics Simulation of Statistical Mechanics Systems, North Holland, Amsterdam, the Netherlands.
44.
Debye
P.
, and
Cleland
R. L.
,
1959
, “
Flow of Liquid Hydrocarbons in Porous Vycor
,”
Journal of Applied Physics
, Vol.
30
, pp.
843
–
849
.
45.
DeCourtye
D.
,
Sen
M.
, and
Gad-el-Hak
M.
,
1998
, “
Analysis of Viscous Micropumps and Microturbines
,”
International Journal of Computational Fluid Dynamics
, Vol.
10
, pp.
13
–
25
.
46.
Den
L. M.
,
1990
, “
Issues in Viscoelastic Fluid Mechanics
,”
Annual Review of Fluid Mechanics
, Vol.
22
, pp.
13
–
34
.
47.
Do¨ring, C., Grauer, T., Marek, J., Mettner, M. S., Trah, H.-P., and Willmann, M., 1992, “Micromachined Thermoelectrically Driven Cantilever Structures for Fluid Jet Deflection,” Proceedings IEEE Micro Electro Mechanical Systems ’92, pp. 12–18, 4–7 February, Travemu¨nde, Germany.
48.
Dussan
E. B.
,
1976
, “
The Moving Contact Line: the Slip Boundary Condition
,”
Journal of Fluid Mechanics
, Vol.
77
, pp.
665
–
684
.
49.
Dussan
E. B.
,
1979
, “
On the Spreading of Liquids on Solid Surfaces: Static and Dynamic Contact Lines
,”
Annual Review of Fluid Mechanics
, Vol.
11
, pp.
371
–
400
.
50.
Dussan
E. B.
, and
Davis
S. H.
,
1974
, “
On the Motion of Fluid-Fluid Interface along a Solid Surface
,”
Journal of Fluid Mechanics
, Vol.
65
, pp.
71
–
95
.
51.
Epstein
A. H.
, and
Senturia
S. D.
,
1997
, “
Macro Power from Micro Machinery
,”
Science
, Vol.
276
, 23 May, p.
1211
1211
.
52.
Epstein, A. H., Senturia, S. D., Al-Midani, O., Anathasuresh, G., Ayon, A., Breuer, K., Chen, K.-S., Ehrich, F. F., Esteve, E., Frechette, L., Gauba, G., Ghod-ssi, R., Groshenry, C., Jacobson, S. A., Kerrebrock, J. L., Lang, J. H., Lin, C.-C, London, A., Lopata, J., Mehra, A., Mur Miranda, J. O., Nagle, S., Orr, D. J., Piekos, E., Schmidt, M. A., Shirley, G., Spearing, S. M., Tan; C. S., Tzeng, Y.-S., and Waitz, I. A. (1997), “Micro-Heat Engines, Gas Turbines, and Rocket Engines—The MIT Microengine Project,” AIAA paper No. 97-1773, AIAA, Reston, VA.
53.
Esashi
M.
,
Shoji
S.
, and
Nakano
A.
,
1989
, “
Normally Closed Microvalve Fabricated on a Silicon Wafer
,”
Sensors and Actuators
, Vol.
20
, pp.
163
–
169
.
54.
Fan
L.-S.
,
Tai
Y.-C.
, and
Muller
R. S.
,
1988
, “
Integrated Movable Micromechanical Structures for Sensors and Actuators
,”
IEEE Transactions on Electronic Devices
, Vol.
35
, pp.
724
–
730
.
55.
Fan
L.-S.
,
Tai
Y.-C.
, and
Muller
R. S.
,
1989
, “
IC-Processed Electrostatic Micromotors
,”
Sensors and Actuators
, Vol.
20
, pp.
41
–
47
.
56.
Feynman, R. P., 1961, “There’s Plenty of Room at the Bottom,” Miniaturization, H. D. Gilbert, ed., pp. 282–296, Reinhold Publishing, New York.
57.
Fiedler
H. E.
, and
Fernholz
H.-H.
,
1990
, “
On Management and Control of Turbulent Shear Flows
,”
Progress in Aerospace Sciences
, Vol.
27
, pp.
305
–
387
.
58.
Fuhr
G.
,
Hagedorn
R.
,
Mu¨ller
T.
,
Benecke
W.
, and
Wagner
B.
,
1992
, “
Microfabricated Electrohydrodynamic (EHD) Pumps for Liquids of Higher Conductivity
,”
Journal of Microelectromechanical Systems
, Vol.
1
, pp.
141
–
145
.
59.
Gabriel
K. J.
,
1995
, “
Engineering Microscopic Machines
,”
Scientific American
, Vol.
260
, Sept, pp.
150
–
153
.
60.
Gabriel, K. J., Jarvis, J., and Trimmer, W. (editors), 1988, Small Machines, Large Opportunities: A Report on the Emerging Field of Microdynamics, National Science Foundation, published by AT&T Bell Laboratories, Murray Hill, NJ.
61.
Gabriel, K. J., Tabata, O., Shimaoka, K., Sugiyama, S., and Fujita, H., 1992, “Surface-Normal Electrostatic/Pneumatic Actuator,” Proceedings IEEE Micro Electro Mechanical Systems ’92, pp. 128–131, 4–7 February, Travemu¨nde, Germany.
62.
Gad-el-Hak
M.
,
1989
, “
Flow Control
,”
Applied Mechanics Reviews
, Vol.
42
, pp.
261
–
293
.
63.
Gad-el-Hak, M., 1993, “Innovative Control of Turbulent Flows,” AIAA Paper No. 93-3268, AIAA, NY.
64.
Gad-el-Hak
M.
,
1994
, “
Interactive Control of Turbulent Boundary Layers: A Futuristic Overview
,”
AIAA Journal
, Vol.
32
, pp.
1753
–
1765
.
65.
Gad-el-Hak
M.
,
1995
, “
Questions in Fluid Mechanics: Stokes’ Hypothesis for a Newtonian, Isotropic Fluid
,”
ASME JOURNAL OF FLUIDS ENGINEERING
, Vol.
117
, pp.
3
–
5
.
66.
Gad-el-Hak
M.
,
1996
, “
Modern Developments in Flow Control
,”
Applied Mechanics Reviews
, Vol.
49
, pp.
365
–
379
.
67.
Gad-el-Hak, M., 1998, “Frontiers of Flow Control,” Flow Control: Fundamentals and Practices, M. Gad-el-Hak, A. Pollard and J.-P. Bonnet, eds., Lecture Notes in Physics, Vol. 53, pp. 109–153, Springer-Verlag, Berlin.
68.
Gad-el-Hak, M., and Blackwelder, R. F., 1987, “A Drag Reduction Method for Turbulent Boundary Layers,” AIAA Paper No. 87-0358, AIAA, New York.
69.
Gad-el-Hak
M.
, and
Blackwelder
R. F.
,
1989
, “
Selective Suction for Controlling Bursting Events in a Boundary Layer
,”
AIAA Journal
, Vol.
27
, pp.
308
–
314
.
70.
Garcia, E. J., and Sniegowski, J. J., 1993, “The Design and Modelling of a Comb-Drive-Based Microengine for Mechanism Drive Applications,” Proceedings of the Seventh International Conference on Solid-State Sensors and Actuators (Transducers ’93), pp. 763–766, Yokohama, Japan, 7–10 June.
71.
Garcia
E. J.
, and
Sniegowski
J. J.
,
1995
, “
Surface Micromachined Microengine
,”
Sensors and Actuators A
, Vol.
48
, pp.
203
–
214
.
72.
Gee
M. L.
,
McGuiggan
P. M.
,
Israelachvili
J. N.
, and
Homola
A. M.
,
1990
, “
Liquid to Solidlike Transitions of Molecularly Thin Films under Shear
,”
Journal of Chemical Physics
, Vol.
93
, pp.
1895
–
1906
.
73.
Gravesen
P.
,
Branebjerg
J.
, and
Jensen
O. S.
,
1993
, “
Microfluidics—A Review
,”
Journal of Micromechanics and Microengineering
, Vol.
3
, pp.
168
–
182
.
74.
Guvenc, M. G., 1985, “V-Groove Capillary for Low Flow Control and Measurement,” Micromachining and Micropackaging of Transducers, C. D. Fung, P. W. Cheung, W. H. Ko and D. G. Fleming, eds., pp. 215–223, Elsevier, Amsterdam, The Netherlands.
75.
Haile, J. M., 1993, Molecular Dynamics Simulation: Elementary Methods, Wiley, New York.
76.
Halsey
T. C.
, and
Martin
J. E.
,
1993
, “
Electrorheological Fluids
,”
Scientific American
, Vol.
269
, Oct., pp.
58
–
64
.
77.
Haritonidis, J. H., Senturia, S. D., Warkentin, D. J., and Mehregany, M., 1990a, “Optical Micropressure Transducer,” United States Patent number 4,926,696, 22 May 1990.
78.
Haritonidis, J. H., Senturia, S. D., Warkentin, D. J., and Mehregany, M., 1990b, “Pressure Transducer Apparatus,” United States Patent number 4,942,767, 24 July 1990.
79.
Harley
J. C.
,
Huang
Y.
,
Bau
H. H.
, and
Zemel
J. N.
,
1995
, “
Gas Flow in Micro-Channels
,”
Journal of Fluid Mechanics
, Vol.
284
, pp.
257
–
274
.
80.
Hirschfelder, J. O., Curtiss, C. F., and Bird, R. B., 1954, Molecular Theory of Gases and Liquids, Wiley, New York.
81.
Ho
C.-M.
, and
Tai
Y.-C.
,
1996
, “
Review: MEMS and Its Applications for Flow Control
,”
ASME JOURNAL OF FLUIDS ENGINEERING
, Vol.
118
, pp.
437
–
447
.
82.
Ho
C-M.
, and
Tai
Y.-C.
,
1998
, “
Micro-Elctro-Mechanical Systems (MEMS) and Fluid Flows
,”
Annual Review of Fluid Mechanics
, Vol.
30
, pp.
579
–
612
.
83.
Ho, C.-M., Tung, S., Lee, G. B., Tai, Y.-C., Jiang, F., and Tsao, T., 1997, “MEMS—A Technology for Advancements in Aerospace Engineering,” AIAA Paper No. 97-0545, AIAA, Washington, D. C.
84.
Hogan, H., 1996, “Invasion of the micromachines,” New Scientist, 29 June, pp. 28–33.
85.
Israelachvili
J. N.
,
1986
, “
Measurement of the Viscosity of Liquids in Very Thin Films
,”
Journal of Colloid and Interface Science
, Vol.
110
, pp.
263
–
271
.
86.
Israelachvili, J. N., 1991, Intermolecular and Surface Forces, second edition. Academic Press, New York.
87.
Jacobson, S. A., and Reynolds, W. C., 1993, “Active Control of Boundary Layer Wall Shear Stress Using Self-Learning Neural Networks,” AIAA Paper No. 93-3272, AIAA, Washington, D. C.
88.
Jacobson, S. A., and Reynolds, W. C., 1995, “An Experimental Investigation Towards the Active Control of Turbulent Boundary Layers,” Department of Mechanical Engineering Report No. TF-64, Stanford University, Stanford, California.
89.
Jacobson
S. A.
, and
Reynolds
W. C.
,
1998
, “
Active Control of Streamwise Vortices and Streaks in Boundary Layers
,”
Journal of Fluid Mechanics
, Vol.
360
, pp.
179
–
211
.
90.
James
R. D.
,
Jacobs
J. W.
, and
Glezer
A.
,
1994
, “
Experimental Investigation of a Turbulent Jet Produced by an Oscillating Surface Actuator
,”
Applied Mechancs Reviews
, Vol.
47
, pp.
S127–S1131
S127–S1131
.
91.
Jeffery
G. B.
,
1920
, “
Plane Stress and Plane Strain in Bipolar Co-ordinates
,”
Philosophical Transactions of the Royal Society, Series A
, Vol.
221
, pp.
265
–
289
.
92.
Kamal
M. M.
,
1966
, “
Separation in the Flow Between Eccentric Rotating Cylinders
,”
ASME Journal of Basic Engineering
, Vol.
88
, pp.
717
–
724
.
93.
Kennard, E. H., 1938, Kinetic Theory of Gases, McGraw-Hill, NY.
94.
Knudsen
M.
,
1909
, “
Die Gesetze der Molekularstro¨mung und der inneren Reibungsstro¨mung der Gase durch Ro¨hren
,”
Annalen der Physik
, Vol.
28
, pp.
75
–
130
.
95.
Kogan, M. N., 1969, Rarefied Gas Dynamics, Nauka, Moscow. Translated from Russian, L. Trilling, ed., Plenum, NY.
96.
Kogan
M. N.
,
1973
, “
Molecular Gas Dynamics
,”
Annual Review of Fluid Mechanics
, Vol.
5
, pp.
383
–
404
.
97.
Koplik
J.
, and
Banavar
J. R.
,
1995
, “
Continuum Deductions from Molecular Hydrodynamics
,”
Annual Review of Fluid Mechanics
, Vol.
27
, pp.
257
–
292
.
98.
Kundu, P. K., 1990, Fluid Mechanics, Academic Press, NY.
99.
Landau, L. D., and Lifshitz, E. M., 1987, Fluid Mechanics, Second Edition, Pergamon Press, Oxford, United Kingdom.
100.
Liang
W. J.
, and
Liou
J. A.
,
1995
, “
Flow Around a Rotating Cylinder Near a Plane Boundary
,”
Journal of the Chinese Institute of Engineers
, Vol.
18
, pp.
35
–
50
.
101.
Liepmann
H. W.
, and
Nosenchuck
D. M.
,
1982
, “
Active Control of Laminar-Turbulent Transition
,”
Journal of Fluid Mechanics
, Vol.
118
, pp.
201
–
204
.
102.
Liepmann
H. W.
,
Brown
G. L.
, and
Nosenchuck
D. M.
,
1982
, “
Control of Laminar Instability Waves Using a New Technique
,”
Journal of Fluid Mechanics
, Vol.
118
, pp.
187
–
200
.
103.
Lighthill, M. J., 1963, “Introduction. Real and Ideal Fluids,” in Laminar Boundary Layers, L. Rosenhead, ed., pp. 1–45, Clarendon Press, Oxford, United Kingdom.
104.
Lipkin
R.
,
1993
, “
Micro Steam Engine Makes Forceful Debut
,”
Science News
, Vol.
144
, p.
197
197
.
105.
Liu, J., Tai, Y. C., Lee, J., Pong, K. C., Zohar, Y., and Ho, C. M., 1993, “In-Situ Monitoring and Universal Modeling of Sacrificial PSG Etching Using Hydrofluoric Acid,” Proceedings IEEE Micro Electro Mechanical Systems ’93, pp. 71–76, IEEE, NY.
106.
Liu, J., Tai, Y. C., Pong, K., and Ho, C. M., 1995, “MEMS for Pressure Distribution Studies of Gaseous Flows in Microchannels,” Proceedings IEEE Micro Electro Mechanical Systems ’95, pp. 209–215, IEEE, NY.
107.
Loeb, L. B., 1961, The Kinetic Theory of Gases, third edition, Dover, New York.
108.
Lo¨fdahl
L.
, and
Gad-el-Hak
M.
,
1999
, “
MEMS Applications in Turbulence and Flow Control
,”
Progress in Aerospace Sciences
, Vol.
35
, pp.
101
–
203
.
109.
Lo¨fdahl
L.
,
Glavmo
M.
,
Johansson
B.
, and
Stemme
G.
,
1993
, “
A Silicon Transducer for the Determination of Wall-Pressure Fluctuations in Turbulent Boundary Layers
,”
Applied Scientific Research
, Vol.
51
, pp.
203
–
207
.
110.
Lo¨fdahl
L.
,
Ka¨lvesten
E.
, and
Stemme
G.
,
1994
, “
Small Silicon Based Pressure Transducers for Measurements in Turbulent Boundary Layers
,”
Experiments in Fluids
, Vol.
17
, pp.
24
–
31
.
111.
Lo¨fdahl
L.
,
Ka¨lvesten
E.
, and
Stemme
G.
,
1996
, “
Small Silicon Pressure Transducers for Space-Time Correlation Measurements in a Flat Plate Boundary Layer
,”
ASME JOURNAL OF FLUIDS ENGINEERING
, Vol.
118
, pp.
457
–
463
.
112.
Loose
W.
, and
Hess
S.
,
1989
, “
Rheology of Dense Fluids via Nonequilibrium Molecular Hydrodynamics: Shear Thinning and Ordering Transition
,”
Rheologica Acta
, Vol.
28
, p.
91
–
101
.
113.
Lumley, J. L., 1991, “Control of the Wall Region of a Turbulent Boundary Layer,” Turbulence: Structure and Control, J. M. McMichael, ed., pp. 61–62, 1–3 Apr., Ohio State University, Columbus, OH.
114.
Lumley, J. L., 1996, “Control of Turbulence,” AIAA paper No. 96-0001, AIAA, Washington, D. C.
115.
Lumley
J.
, and
Blossey
P.
,
1998
, “
Control of Turbulence
,”
Annual Review of Fluid Mechanics
, Vol.
30
, pp.
311
–
327
.
116.
Majumdar
A.
, and
Mezic
I.
,
1998
, “
Stability Regimes of Thin Liquid Films
,”
Microscale Thermophysical Engineering
, Vol.
2
, pp.
203
–
213
.
117.
Majumdar, A., and Mezic, I., 1999, “Instability of Ultra-Thin Water Films and the Mechanism of Droplet Formation on Hydrophilic Surfaces,” Proceedings of the ASME-JSME Thermal Engineering and Solar Energy Joint Conference, San Diego, CA, 15–19 March.
118.
Mastrangelo, C., and Hsu, C. H., 1992, “A Simple Experimental Technique for the Measurement of the Work of Adhesion of Microstructures,” Technical Digest IEEE Solid-State Sensors and Actuators Workshop, pp. 208–212, IEEE, NY.
119.
Maureau
J.
,
Sharatchandra
M. C.
,
Sen
M.
, and
Gad-el-Hak
M.
,
1997
, “
Flow and Load Characteristics of Microbearings with Slip
,”
Journal of Micromechanics and Microengineering
, Vol.
7
, pp.
55
–
64
.
120.
Maxwell
J. C.
,
1879
, “
On Stresses in Rarefied Gases Arising from Inequalities of Temperature
,”
Philosophical Transactions of the Royal Society Part I
, Vol.
170
, pp.
231
–
256
.
121.
McMichael, J. M., 1996, “Progress and Prospects for Active Flow Control Using Microfabricated Electromechanical Systems (MEMS),” AIAA Paper No. 96-0306, AIAA, Washington, D. C.
122.
Mehregany, M., DeAnna, R. G., Reshotko, E., 1996, “Microelectromechanical Systems for Aerodynamics Applications,” AIAA Paper No. 96-0421, AIAA, Washington, D. C.
123.
Migun
N. P.
, and
Prokhorenko
P. P.
,
1987
, “
Measurement of the Viscosity of Polar Liquids in Microcapillaries
,”
Colloid Journal of the USSR
, Vol.
49
, pp.
894
–
897
.
124.
Moffatt
H. K.
,
1964
, “
Viscous and Resistive Eddies Near a Sharp Corner
,”
Journal of Fluid Mechanics
, Vol.
18
, pp.
1
–
18
.
125.
Moin
P.
, and
Bewley
T.
,
1994
, “
Feedback Control of Turbulence
,”
Applied Mechanics Reviews
, Vol.
47
, pp.
S3–S13
S3–S13
.
126.
Moroney, R. M., White, R. M., and Howe, R. T., 1991 “Ultrasonically Induced Microtransport,” Proceedings IEEE Micro Electro Mechanical Systems ’91, Nara, Japan, pp. 277–282, IEEE, NY.
127.
Muntz
E. P.
,
1989
, “
Rarefied Gas Dynamics
,”
Annual Review of Fluid Mechanics
, Vol.
21
, pp.
387
–
417
.
128.
Nadolink
R. H.
, and
Haigh
W. W.
,
1995
, “
Bibliography on Skin Friction Reduction with Polymers and other Boundary-Layer Additives
,”
Applied Mechanics Reviews
, Vol.
48
, pp.
351
–
459
.
129.
Nakagawa, S., Shoji, S., and Esashi, M., 1990, “A Micro-Chemical Analyzing System Integrated on Silicon Chip,” Proceedings IEEE: Micro Electro Mechanical Systems, IEEE 90CH2832-4, Napa Valley, CA.
130.
O’Connor
L.
,
1992
, “
MEMS: Micromechanical Systems
,”
Mechanical Engineering
, Vol.
114
, Feb., pp.
40
–
47
.
131.
Odell
G. M.
, and
Kovasznay
L. S. G.
,
1971
, “
A New Type of Water Channel with Density Stratification
,”
Journal of Fluid Mechanics
, Vol.
50
, pp.
535
–
543
.
132.
Oran
E. S.
,
Oh
C. K.
, and
Cybyk
B. Z.
,
1998
, “
Direct Simulation Monte Carlo: Recent Advances and Applications
,”
Annual Review of Fluid Mechanics
, Vol.
30
, pp.
403
–
441
.
133.
Panton, R. L., 1996, Incompressible Flow, Second Edition, Wiley-Interscience, NY.
134.
Pearson, J. R. A., and Petrie, C. J. S., 1968, “On Melt Flow Instability of Extruded Polymers,” Polymer Systems: Deformation and Flow, R. E. Wetton and R. W. Whorlow, eds., pp. 163–187, Macmillan, London, United Kingdom.
135.
Pfahler, J., 1992, “Liquid Transport in Micron and Submicron Size Channels,” Ph.D. thesis. University of Pennsylvania, Philadelphia, Pennsylvania.
136.
Pfahler
J.
,
Harley
J.
,
Bau
H.
, and
Zemel
J. N.
,
1990
, “
Liquid Transport in Micron and Submicron Channels
,”
Sensors and Actuators
, Vol.
A21–A23
, pp.
431
–
434
.
137.
Pfahler, J., Harley, J., Bau, H., and Zemel, J. N., 1991, “Gas and Liquid Flow in Small Channels,” Symposium on Micromechanical Sensors, Actuators, and Systems, D. Cho et al., eds., ASME DSC-Vol. 32, pp. 49–60, ASME, NY.
138.
Piekos
E. S.
, and
Breuer
K. S.
,
1996
, “
Numerical Modeling of Micromechanical Devices Using the Direct Simulation Monte Carlo Method
,”
ASME JOURNAL OF FLUIDS ENGINEERING
, Vol.
118
, pp.
464
–
469
.
139.
Piekos, E. S., Orr, D. J., Jacobson, S. A., Ehrich, F. F., and Breuer, K. S., 1997, “Design and Analysis of Microfabricated High Speed Gas Journal Bearings,” AIAA Paper No. 97-1966, AIAA, Reston, VA.
140.
Pister, K. S. J., Fearing, R. S., and Howe, R. T., 1990, “A Planar Air Levitated Electrostatic Actuator System,” IEEE Paper No. CH2832-4/90/0000–0067, IEEE, NY.
141.
Pong, K.-C., Ho, C.-M., Liu, J., and Tai, Y.-C., 1994, “Non-Linear Pressure Distribution in Uniform Microchannels,” Application of Microfabrication to Fluid Mechanics 1994, P. R. Bandyopadhyay, K. S. Breuer and C. J. Belchinger, eds., ASME FED-Vol. 197, pp. 47–52, ASME, NY.
142.
Porodnov
B. T.
,
Suetin
P. E.
,
Borisov
S. F.
, and
Akinshin
V. D.
,
1974
, “
Experimental Investigation of Rarefied Gas Flow in Different Channels
,”
Journal of Fluid Mechanics
, Vol.
64
, pp.
417
–
437
.
143.
Prud’homme
R. K.
,
Chapman
T. W.
, and
Bowen
J. R.
,
1986
, “
Laminar Compressible Flow in a Tube
,”
Applied Scientific Research
, Vol.
43
, pp.
67
–
74
.
144.
Reynolds, W. C., 1993, “Sensors, Actuators, and Strategies for Turbulent Shear-Flow Control,” invited oral presentation at the AIAA Third Flow Control Conference, Orlando, FL, 6–9 July.
145.
Richardson
S.
,
1973
, “
On the No-Slip Boundary Condition
,”
Journal of Fluid Mechanics
, Vol.
59
, pp.
707
–
719
.
146.
Richter
A.
,
Plettner
A.
,
Hofmann
K. A.
, and
Sandmaier
H.
,
1991
, “
A Micro-machined Electrohydrodynamic (EHD) Pump
,”
Sensors and Actuators A
, Vol.
29
, pp.
159
–
168
.
147.
Robinson
S. K.
,
1991
, “
Coherent Motions in the Turbulent Boundary Layer
,”
Annual Review of Fluid Mechanics
, Vol.
23
, pp.
601
–
639
.
148.
Schaaf, S. A., and Chambre´, P. L., 1961, Flow of Rarefied Cases, Princeton University Press, Princeton, NJ.
149.
Seidl, M., and Steinheil, E., 1974, “Measurement of Momentum Accommodation Coefficients on Surfaces Characterized by Auger Spectroscopy, SIMS and LEED,” Rarefied Gas Dynamics 9, M. Becker and M. Fiebig, eds., pp. E9.1-E9.2, DFVLR-Press, Porz-Wahn, Germany.
150.
Sen
M.
,
Wajerski
D.
, and
Gad-el-Hak
M.
,
1996
, “
A Novel Pump for MEMS Applications
,”
ASME JOURNAL OF FLUIDS ENGINEERING
, Vol.
118
, pp.
624
–
627
.
151.
Sharatchandra
M. C.
,
Sen
M.
, and
Gad-el-Hak
M.
,
1997
, “
Navier-Stokes Simulations of a Novel Viscous Pump
,”
ASME JOURNAL OF FLUIDS ENGINEERING
, Vol.
119
, pp.
372
–
382
.
152.
Sharatchandra
M. C.
,
Sen
M.
, and
Gad-el-Hak
M.
,
1998
a, “
Thermal Aspects of a Novel Micropumping Device
,”
ASME Journal of Heat Transfer
, Vol.
120
, pp.
99
–
107
.
153.
Sharatchandra
M. C.
,
Sen
M.
, and
Gad-el-Hak
M.
,
1998
b, “
A New Approach to Constrained Shape Optimization Using Genetic Algorithms
,”
AIAA Journal
, Vol.
36
, pp.
51
–
61
.
154.
Sherman, F. S., 1990, Viscous Flow, McGraw-Hill, NY.
155.
Shih, J. C., Ho, C.-M., Liu, J., and Tai, Y.-C., 1995, “Non-Linear Pressure Distribution in Uniform Microchannels,” ASME AMD-MD-Vol. 238, ASME, NY.
156.
Shih, J. C., Ho, C.-M., Liu, J., and Tai, Y-.C., 1996, “Monatomic and Polyatomic Gas Flow through Uniform Microchannels,” Applications of Microfabrication to Fluid Mechanics, K. Breuer, P. Bandyopadhyay and M. Gad-el-Hak, eds., ASME DSC-Vol. 59, pp. 197–203, ASME, NY.
157.
Smits
J. G.
,
1990
, “
Piezoelectric Micropump with Three Valves Working Peristaltically
,”
Sensors and Actuators A
, Vol.
21-23
, pp.
203
–
206
.
158.
Smoluchowski
von M.
,
1898
, “
Ueber Wa¨rmeleitung in verdu¨nnten Gasen
,”
Annalen der Physik und Chemie
, Vol.
64
, pp.
101
–
130
.
159.
Sniegowski
J. J.
, and
Garcia
E. J.
,
1996
, “
Surface Micromachined Gear Trains Driven by an On-Chip Electrostatic Microengine
,”
IEEE Electron Device Letters
, Vol.
17
, July, p.
366
366
.
160.
Swift, J., 1727, Gulliver’s Travels, 1906 reprinting, J. M. Dent and Company, London.
161.
Tai
Y.-C.
, and
Muller
R. S.
,
1989
, “
IC-Processed Electrostatic Synchronous Micromotors
,”
Sensors and Actuators
, Vol.
20
, pp.
49
–
55
.
162.
Tang
W. C.
,
Nguyen
T.-C.
, and
Howe
R. T.
,
1989
, “
Laterally Driven Polysilicon Resonant Microstructures
,”
Sensors and Actuators
, Vol.
20
, pp.
25
–
32
.
163.
Taylor, G., 1972, “Low-Reynolds-Number Flows,” Illustrated Experiments in Fluid Mechanics, pp. 47–54, National Committee for Fluid Mechanics Films, MIT Press, Cambridge, MA.
164.
Tennekes, H., and Lumley, J. L., 1972, A First Course in Turbulence, MIT Press, Cambridge, MA.
165.
Thomas, L. B., and Lord, R. G., 1974, “Comparative Measurements of Tangential Momentum and Thermal Accommodations on Polished and on Roughened Steel Spheres,” Rarefied Gas Dynamics 8, K. Karamcheti, ed., Academic Press, NY.
166.
Thompson
P. A.
, and
Robbins
M. O.
,
1989
, “
Simulations of Contact Line Motion: Slip and the Dynamic Contact Line
,”
Nature
, Vol.
389
, 25 Sept., pp.
360
–
362
.
167.
Thompson
P. A.
, and
Troian
S. M.
,
1997
, “
A General Boundary Condition for Liquid Flow at Solid Surfaces
,”
Physical Review Letters
, Vol.
63
, pp.
766
–
769
.
168.
Tien
N. C.
,
1997
, “
Silicon Micromachined Thermal Sensors and Actuators
,”
Microscale Thermophysical Engineering
, Vol.
1
, pp.
275
–
292
.
169.
Tison
S. A.
,
1993
, “
Experimental Data and Theoretical Modeling of Gas Flows Through Metal Capillary Leaks
,”
Vacuum
, Vol.
44
, pp.
1171
–
1175
.
170.
Tsao
T.
,
Jiang
F.
,
Miller
R. A.
,
Tai
Y.-C.
,
Gupta
B.
,
Goodman
R.
,
Tung
S.
, and
Ho
C.-M.
,
1997
, “
An Integrated MEMS System for Turbulent Boundary Layer Control
,”
Technical Digest
(Transducers ’97), Vol.
1
, pp.
315
–
318
.
171.
Tuckermann, D. B., 1984, “Heat Transfer Microstructures for Integrated Circuits,” Ph.D. thesis, Stanford University, Stanford, CA.
172.
Tuckermann, D. B., and Pease, R. F. W., 1981, “High-Performance Heat Sinking for VLSI,” IEEE Electron Device Letters, Vol. EDL-2, No. 5, May.
173.
Tuckermann, D. B., and Pease, R. F. W., 1982, “Optimized Convective Cooling Using Micromachined Structures,” Journal of Electrochemical Society, Vol. 129, no. 3, C98, March.
174.
Van den Berg
H. R.
,
Seldam
C. A.
, and
Gulik
P. S.
,
1993
, “
Compressible Laminar Flow in a Capillary
,”
Journal of Fluid Mechanics
, Vol.
246
, pp.
1
–
20
.
175.
Van Lintel
H. T. G.
,
Van de Pol
F. C. M.
, and
Bouwstra
S.
,
1988
, “
A Piezoelectric Micropump Based on Micromachining of Silicon
,”
Sensors and Actuators
, Vol.
15
, pp.
153
–
167
.
176.
Vargo, S. E., and Muntz, E. P., 1996, “A Simple Micromechanical Compressor and Vacuum Pump for Flow Control and Other Distributed Applications,” AIAA Paper No. 96-0310, AIAA, Washington, D. C.
177.
Vincenti, W. G., and Kruger, C. H., Jr., 1965, Introduction to Physical Gas Dynamics, Wiley, NY.
178.
Wadsworth, D. C., Muntz, E. P., Blackwelder, R. F., and Shiflett, G. R., 1993, “Transient Energy Release Pressure Driven Microactuators for Control of Wall-Bounded Turbulent Flows,” AIAA Paper No. 93-3271, AIAA, Washington, D. C.
179.
Wannier
G. H.
,
1950
, “
A Contribution to the Hydrodynamics of Lubrication
,”
Quarterly of Applied Mathematics
, Vol.
8
, pp.
1
–
32
.
180.
Warkentin, D. J., Haritonidis, J. H., Mehregany, M., and Senturia, S. D., 1987, “A Micromachined Microphone with Optical Interference Readout,” Proceedings of the Fourth International Conference on Solid-State Sensors and Actuators (Transducers ’87), Tokyo, Japan, June.
181.
Went
F. W.
,
1968
, “
The Size of Man
,”
American Scientist
, Vol.
56
, pp.
400
–
413
.
182.
Wilkinson, S. P., 1990, “Interactive Wall Turbulence Control,” in Viscous Drag Reduction in Boundary Layers, D. M. Bushnell and J. N. Hefner, eds., Progress in Astronautics and Aeronautics, Vol. 123, 479–509, AIAA, Washington, D. C.
183.
Wiltse
J. M.
, and
Glezer
A.
,
1993
, “
Manipulation of Free Shear Flows Using Piezoelectric Actuators
,”
Journal of Fluid Mechanics
, Vol.
249
, pp.
261
–
285
.
184.
Young, A. M., Goldsberry, J. E., Haritonidis, J. H., Smith, R. I., and Senturia, S. D., 1988, “A Twin-Interferometer Fiber-Optic Readout for Diaphragm Pressure Transducers,” IEEE Solid-State Sensor and Actuator Workshop, June 6–9, Hilton Head, SC.
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