Analysis of the two-dimensional (2D) distribution of excited Ar atoms has been made to synthesize better anode materials for lithium-ion batteries. The 2D visualization of excitation temperatures was based on the “two-line” method, which are important to diagnose the plasmas used for the preparation of carbonaceous materials by plasma enhanced chemical vapor deposition. The results showed that the excitation temperature in N2-rich (CH4-lean) plasma was lower than that in N2-lean (CH4-rich), and is attributed to different excitation and reaction mechanisms of CH4 and N2.

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