Under the proper orientations and excitations, the transverse output of rotationally symmetric four-contact van der Pauw (VDP) stress sensors depends upon only the in-plane shear stress or the difference of the in-plane normal stresses on (100) silicon. In bridge-mode, each sensor requires only one four-wire measurement and produces an output voltage with a sensitivity that is 3.16 times that of the equivalent resistor rosettes or bridges, just as in the normal VDP sensor mode that requires two separate measurements. Both numerical and experimental results are presented to validate the conjectured behavior of the sensor. Similar results apply to sensors on (111) silicon. The output voltage results provide a simple mathematical expression for the offset voltage in Hall effect devices or the response of pseudo Hall-effect sensors. Bridge operation facilitates use of the VDP structure in embedded stress sensors in integrated circuits.
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December 2014
Research-Article
Four-Wire Bridge Measurements of Silicon van der Pauw Stress Sensors
Richard C. Jaeger,
Richard C. Jaeger
Electrical Engineering Department,
Alabama Micro/Nano Science
and Technology Center,
e-mail: rj@jaegerengineering.com
Alabama Micro/Nano Science
and Technology Center,
Auburn University
,Auburn, AL 36849
e-mail: rj@jaegerengineering.com
Search for other works by this author on:
Mohammad Motalab,
Mohammad Motalab
Mechanical Engineering Department,
Center for Advanced Vehicle and Extreme
Environment Electronics (CAVE3),
Center for Advanced Vehicle and Extreme
Environment Electronics (CAVE3),
Auburn University
,Auburn, AL 36849
Search for other works by this author on:
Safina Hussain,
Safina Hussain
Mechanical Engineering Department,
Center for Advanced Vehicle and Extreme
Environment Electronics (CAVE3),
Center for Advanced Vehicle and Extreme
Environment Electronics (CAVE3),
Auburn University
,Auburn, AL 36849
Search for other works by this author on:
Jeffrey C. Suhling
Jeffrey C. Suhling
Mechanical Engineering Department,
Center for Advanced Vehicle and Extreme
Environment Electronics (CAVE3),
Center for Advanced Vehicle and Extreme
Environment Electronics (CAVE3),
Auburn University
,Auburn, AL 36849
Search for other works by this author on:
Richard C. Jaeger
Electrical Engineering Department,
Alabama Micro/Nano Science
and Technology Center,
e-mail: rj@jaegerengineering.com
Alabama Micro/Nano Science
and Technology Center,
Auburn University
,Auburn, AL 36849
e-mail: rj@jaegerengineering.com
Mohammad Motalab
Mechanical Engineering Department,
Center for Advanced Vehicle and Extreme
Environment Electronics (CAVE3),
Center for Advanced Vehicle and Extreme
Environment Electronics (CAVE3),
Auburn University
,Auburn, AL 36849
Safina Hussain
Mechanical Engineering Department,
Center for Advanced Vehicle and Extreme
Environment Electronics (CAVE3),
Center for Advanced Vehicle and Extreme
Environment Electronics (CAVE3),
Auburn University
,Auburn, AL 36849
Jeffrey C. Suhling
Mechanical Engineering Department,
Center for Advanced Vehicle and Extreme
Environment Electronics (CAVE3),
Center for Advanced Vehicle and Extreme
Environment Electronics (CAVE3),
Auburn University
,Auburn, AL 36849
Contributed by the Electronic and Photonic Packaging Division of ASME for publication in the JOURNAL OF ELECTRONIC PACKAGING. Manuscript received March 2, 2014; final manuscript received August 15, 2014; published online September 19, 2014. Assoc. Editor: Satish Chaparala.
J. Electron. Packag. Dec 2014, 136(4): 041014 (10 pages)
Published Online: September 19, 2014
Article history
Received:
March 2, 2014
Revision Received:
August 15, 2014
Connected Content
A companion article has been published:
Erratum: “Four-Wire Bridge Measurements of Silicon van der Pauw Stress Sensors” [ASME J. Electron. Packag., 2014, 136(4), p. 041014; DOI: 10.1115/1.4028333]
Citation
Jaeger, R. C., Motalab, M., Hussain, S., and Suhling, J. C. (September 19, 2014). "Four-Wire Bridge Measurements of Silicon van der Pauw Stress Sensors." ASME. J. Electron. Packag. December 2014; 136(4): 041014. https://doi.org/10.1115/1.4028333
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