A polymerase chain reaction (PCR) microchip array with a dimension of 21.3×17.5 mm2 has been fabricated by the silicon micromachining technique. The chip is composed of 192 rectangular reaction chambers with the volume of 50 nL. In order to package the silicon-based PCR chip, a low-temperature bonding technique using polymers as the intermediate layers has been developed. The tested polymers include positive photoresist, polyimide, and epoxy. Using stamping and sandwich techniques, void-free and liquid-proof bondings of silicon to a glass cover were achieved with the three polymers. The experimental results of fluorescence-based PCR demonstrate that the DNA amplification can be performed in the chip arrays with nanoliter volumes and the polymer bonding technique is biocompatible and suitable for the microchip packaging.
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March 2005
Article
PCR Microchip Array Based on Polymer Bonding Technique
Ting Li,
Ting Li
Institute of Microelectronics, Peking University, Beijing 100871, China
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Lin Hao,
Lin Hao
Department of Hematology, Peking University First Hospital, Beijing 100034, China
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Dacheng Zhang
Dacheng Zhang
Institute of Microelectronics, Peking University, Beijing 100871, China
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Ting Li
Institute of Microelectronics, Peking University, Beijing 100871, China
Lin Hao
Department of Hematology, Peking University First Hospital, Beijing 100034, China
Dacheng Zhang
Institute of Microelectronics, Peking University, Beijing 100871, China
Manuscript received January 7, 2004; revision received July 22, 2004. Review conducted by: Y. C. Chan.
J. Electron. Packag. Mar 2005, 127(1): 38-42 (5 pages)
Published Online: March 21, 2005
Article history
Received:
January 7, 2004
Revised:
July 22, 2004
Online:
March 21, 2005
Citation
Yu, X., Li, T., Hao, L., and Zhang, D. (March 21, 2005). "PCR Microchip Array Based on Polymer Bonding Technique." ASME. J. Electron. Packag. March 2005; 127(1): 38–42. https://doi.org/10.1115/1.1849231
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