This paper proposes a novel precision replication procedure having two stages: a molding process and a replication process assisted by an infrared radiation from an external source, and possessing the effect of birefringence reduction simultaneously. The experiments had been conducted for the replication process of CD. The proposed process has been proved to be feasible for the submicron replication by heating the surface of the resin, therefore, the reduction of birefringence remained in a work piece by some tens seconds irradiation.

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