Recently, great interest has been shown in the fabrication of functional surfaces with periodic micro- and nanostructures due to their application in new optics, automotive, aerospace, biomedical, and power generation devices [1, 2]; this is due to the excellent abilities, such as reducing adhesion friction, improving lubricity, and specific optical properties [3–5]. There are numerous machining methods for the production of microstructures, such as micro-electro-mechanical systems (MEMSs) technology, mechanical machining, and special processing [6, 7]. However, all of these methods have significant drawbacks, such as high cost, low efficiency, and the resulting serious environmental pollution [7, 8]. Diamond machining is the most widely used method for manufacturing precision parts, and is also capable of fabricating various surface structures, which have been illustrated in a recent review [9]. It is concluded that the range of machinable structures is limited and machining efficiency is dependent on the machined structures. The development of a novel machining method formicrostructures has been a common research focus.