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ASME Press Select Proceedings
International Conference on Mechanical and Electrical Technology, 3rd, (ICMET-China 2011), Volumes 1–3
By
ISBN:
9780791859810
No. of Pages:
906
Publisher:
ASME Press
Publication date:
2011
eBook Chapter
213 Surface Microtexturevg of Cylindrical Surface with Through-Mask Electrochemical Micromachining
By
Xiuqing Hao
,
Xiuqing Hao
State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering,
Xi'an Jiaotong University
, Xi'an, 710049
, China
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Li Wang
,
Li Wang
State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering,
Xi'an Jiaotong University
, Xi'an, 710049
, China
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Fangliang Guo
,
Fangliang Guo
State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering,
Xi'an Jiaotong University
, Xi'an, 710049
, China
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Yucheng Ding
Yucheng Ding
State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering,
Xi'an Jiaotong University
, Xi'an, 710049
, China
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Page Count:
6
-
Published:2011
Citation
Hao, X, Wang, L, Guo, F, & Ding, Y. "Surface Microtexturevg of Cylindrical Surface with Through-Mask Electrochemical Micromachining." International Conference on Mechanical and Electrical Technology, 3rd, (ICMET-China 2011), Volumes 1–3. Ed. Xie, Y. ASME Press, 2011.
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The electrochemical micromachining (EMM) technique is proposed to the fabrication of cylindrical surface texture. A rod covered with photoresist is subarea-exposed with a collimated UV source through a mask by rotation of a definite angle each time. The patterned rod is etched with a concentric cylindrical counter electrode and then microstructures on rod surface are obtained. With the combination of experiments and numerical simulation, the anodic dissolution process is predicted and the ordered microstructures with a feature size down to 40μm in large-scale on cylindrical surface are obtained. Furthermore, the reasons of etched quality and nonuniformity are discussed from three...
Topics:
Micromachining
Abstract
Key Words
1 Introduction
2. Experimental Details
3. Numerical Simulation
4. Results and Discussion
5. Summaries
References
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