213 Surface Microtexturevg of Cylindrical Surface with Through-Mask Electrochemical Micromachining

The electrochemical micromachining (EMM) technique is proposed to the fabrication of cylindrical surface texture. A rod covered with photoresist is subarea-exposed with a collimated UV source through a mask by rotation of a definite angle each time. The patterned rod is etched with a concentric cylindrical counter electrode and then microstructures on rod surface are obtained. With the combination of experiments and numerical simulation, the anodic dissolution process is predicted and the ordered microstructures with a feature size down to 40μm in large-scale on cylindrical surface are obtained. Furthermore, the reasons of etched quality and nonuniformity are discussed from three aspects, in which, the etched nonuniformity is mostly ascribed to the current aggregate effect due to the variety of surface patterning on the cylinder.