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International Conference on Mechanical and Electrical Technology, 3rd, (ICMET-China 2011), Volumes 1–3

Yi Xie
Yi Xie
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In this study, micro/nano poly-pillar arrays are fabricated by dielecphoretic-force-driven-filling reverse-imprint method. In this method, a conducive mold is dipped into a pool of pre-polymer, which is dropped onto a conductive substrate, and a voltage is applied between the mold and the substrate. The liquid-dielectrophoresis (L-DEP) force can be generated by the applied voltage to drive pre-polymer filling into cavities of the mold. After the filling process is completed, the mold with pre-polymer in its cavities is moved out off the pre-polymer pool and put onto a target substrate. Then the pre-polymer is cured the by UV-light irradiation and subsequently...

Key Words
1. Introduction
2. Experiments
3. Results and Discussion
4. Summaries
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