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ASME Press Select Proceedings

International Conference on Mechanical and Electrical Technology, 3rd, (ICMET-China 2011), Volumes 1–3

By
Yi Xie
Yi Xie
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ISBN:
9780791859810
No. of Pages:
906
Publisher:
ASME Press
Publication date:
2011

For the deformation problem of electrostatically actuated microbeams used in MEMS, based on the parallel-plate prototype, pull-in behaviors of a cantilever microbeam have been analyzed by selecting the modal shape functions of cantilever beams as admissible trial function and using Rayleigh-Ritz energy method. Approximate analytical expressions for pull-in voltage and normalized pull-in displacement of a cantilever microbeam at the free end have been obtained. When the pull-in occurs, the pull-in voltage and normalized pull-in displacement of the cantilever beam at the free end are 73.95V and 0.448, respectively. Compared to the results reported in other literatures, it is shown that...

Abstract
Key Words
1 Introduction
2. Model
3 Semi-Analytical Expressions
4. Conclusions
Acknowledge
References
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