International Conference on Mechanical and Electrical Technology, 3rd, (ICMET-China 2011), Volumes 1–3
131 Semi-Analytical Model of the Pull-In Behavior of an Electrostatically Actuated Cantilever Microbeam
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For the deformation problem of electrostatically actuated microbeams used in MEMS, based on the parallel-plate prototype, pull-in behaviors of a cantilever microbeam have been analyzed by selecting the modal shape functions of cantilever beams as admissible trial function and using Rayleigh-Ritz energy method. Approximate analytical expressions for pull-in voltage and normalized pull-in displacement of a cantilever microbeam at the free end have been obtained. When the pull-in occurs, the pull-in voltage and normalized pull-in displacement of the cantilever beam at the free end are 73.95V and 0.448, respectively. Compared to the results reported in other literatures, it is shown that...