Skip to Main Content
Skip Nav Destination
ASME Press Select Proceedings

International Conference on Mechanical and Electrical Technology, 3rd, (ICMET-China 2011), Volumes 1–3

Yi Xie
Yi Xie
Search for other works by this author on:
No. of Pages:
ASME Press
Publication date:

For the deformation problem of electrostatically actuated microbeams used in MEMS, based on the parallel-plate prototype, pull-in behaviors of a cantilever microbeam have been analyzed by selecting the modal shape functions of cantilever beams as admissible trial function and using Rayleigh-Ritz energy method. Approximate analytical expressions for pull-in voltage and normalized pull-in displacement of a cantilever microbeam at the free end have been obtained. When the pull-in occurs, the pull-in voltage and normalized pull-in displacement of the cantilever beam at the free end are 73.95V and 0.448, respectively. Compared to the results reported in other literatures, it is shown that...

Key Words
1 Introduction
2. Model
3 Semi-Analytical Expressions
4. Conclusions
This content is only available via PDF.
You do not currently have access to this chapter.
Close Modal

or Create an Account

Close Modal
Close Modal