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ASME Press Select Proceedings
International Conference on Mechanical and Electrical Technology, 3rd, (ICMET-China 2011), Volumes 1–3
Yi Xie
Yi Xie
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ASME Press
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A compact CMUT structure with movable floating gate is presented. The new active CMUT structure comprises two traditional CMUT electrodes and MOS transistor well beneath it. Its spice model on DC analysis and transient analysis with time-varying capacitor are investigated. It exhibits low overall parasitic capacitance and low output impedance compared with traditional one. According to Cadence simulation results, the output signal amplitude is 54 uV, while the noise floor is 33.21 nV/Hz1/2 at 1MHz operation frequency of CMUT receiver, and the output impedance is only about 153Q. These results show advantages to make an interesting potential application on CMUT array imaging.

Key Words
1. Introduction
2. Device Fabricatio & Operation Principle
3. Spice Model
4. Simulation and Results
5. Summaries
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