4 Design and Simulation of a Novel Linear Thermal Mass Flow Meter

Thermal mass flow meters are one of the commonly used sensors to measure fluids flow. There are two types of thermal mass flow meters: insertion type and capillary type. In this paper, we proposed a novel design of insertion type flow meters. First, a 2D sensor model introduced and simulated. Then, to increase linearity of the sensor, design of the heater was changed. Finally, a 3D model with a high range of linearity was introduced.