298 Study of Micro Vibration Detection Based on the Tunneling Effect

Scanning tunneling microscopy is easily affected by the external micro vibration. The influence of vibration has already become one of main obstacles to improve the nano measurement accuracy. The technique of anti-vibration, vibration isolation and vibration compensation turns into a new branch in nano measurement field. In order to reduce the influence of micro random vibration, it is necessary to measure the external vibration to compensate the experiment result of scanning tunneling microscoy. So the experimental device is developed and experiment of vibration detection is made. The experiment results show that results have high sensitivity, good frequency characteristic and the same vibratory response characteristic consistent with scanning tunneling microscopy.