International Hydrogen Conference (IHC 2012): Hydrogen-Materials Interactions
85 Effects of Solute Hydrogen on the Toughness of Polycrystalline Silicon
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Polycrystalline silicon (polysilicon) produced using the fluidized bed reactor method was examined to study the effect of solute hydrogen on toughness in this material. Hydrogen was identified using infrared spectroscopy, and toughness was determined using indentation techniques. Polysilicon with almost no hydrogen in the production process has toughness of 0.97 MPa.m1/2, while samples with increased hydrogen have toughness between 0.74-0.79 MPa.m1/2. Annealing polysilicon to remove solute hydrogen increased the toughness at least 13%, but also leads to an increase in the grain size.