International Conference on Instrumentation, Measurement, Circuits and Systems (ICIMCS 2011)
234 Computer Aided Design of Vacuum Systems
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This paper develops a computer aided design tool to generate solid models for vacuum systems. For a typical vacuum system composed of components such as main chambers, con-flat flanges, side tubes, tube flanges, vent valves, angle valves, vacuum gates, scroll pumps, turbo pumps, and ion pumps, the solid model can be constructed automatically with given configuration layout parameters and component parameters. Vacuum components included in the vacuum library are defined by appropriate geometric parameters and their solid models are established by AutoLisp programs within AutoCAD software. Both the configuration and component parameters are inputted through customized input dialogues. Finally, the CAD tool can also predict the pumping efficiency of the vacuum system with given design parameters.