1 Adaptive Tracking Control of Uncertain Electrostatic Micro-Actuators

A novel adaptive robust control scheme is proposed for a class of single-degree-of-freedom (1DOF) electrostatic micro-actuator systems in the presence of parameter uncertainties and external disturbances. This method incorporates with modified adaptive backstepping control technique and disturbances attenuation control technique. Based on this method, the design procedure and the derived controller are all systemic, and the controller guarantees that the output tacking error satisfies the given tracking performance. Simulation results show that prescribed transient output tracking performance can be achieved, and the closed-loop system exhibits good robustness to system uncertainties.