124 Design and Simulation of a Novel Electrostatic Tunable MEMS Inductor for RF Apllications

This paper introduces a novel MEMS electrostatic tunable inductor. The proposed structure consists of a solenoid inductor, two cores at two sides of the solenoid inductor, two cantilever beams which is attached to cores and electrodes of the electrostatic actuation. The laminated NiFe is utilized for core material, because of its low conductivity and the polysilicon is employed for cantilever beam because of its good mechanical properties. The mechanism of inductance tuning is based on core displacing. The structure is simulated using COMSOL software and simulation results are shown a 31% tuning range at the frequency of 8GHz and a quality factor of 5.6. The required electrostatic actuation voltage is 86.2V.