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ASME Press Select Proceedings

International Conference on Mechanical Engineering and Technology (ICMET-London 2011)

Editor
Garry Lee
Garry Lee
Information Engineering Research Institute
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ISBN:
9780791859896
No. of Pages:
906
Publisher:
ASME Press
Publication date:
2011

A new magnetic levitation stage which has two dimensional movements on the horizontal plane is presented. Based on the single-degree-of-freedom magnetic suspension system, the dynamic model of the stage is established. The modal of the stage has been simulated by finite element analysis. The results of the simulation show that the suspension position of the magnetic levitation stage have little relations to the natural frequencies from the first to the fourth. When the magnetic levitation stage located on the central position, the modal shapes of the stage are mainly influenced by the arrangement of the horizontal electromagnets and have little influence on the vertical electromagnets. The modal analysis is helpful for the design of the magnetic levitation stage controller and the optimization of the controller variable.

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