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ASME Press Select Proceedings

International Conference on Electronics, Information and Communication Engineering (EICE 2012)

By
Garry Lee
Garry Lee
Information Engineering Research Institute
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ISBN:
9780791859971
No. of Pages:
1008
Publisher:
ASME Press
Publication date:
2012

Capacity planning in semiconductor manufacturing is very complex due to numerous variables and constraints. The identification of risk factors for capacity forecasting is a bottleneck of capacity planning. This paper describes key methodologies to solve the intricate problems. On the basis of the given tops event and bottom events, the fault tree of excess capacity forecasting was built. Then it was qualitatively analyzed with artificial deductive method, and was quantitatively analyzed with computer-aided method. Finally, the process of risk identification and risk factors of excess capacity forecasting were obtained, and the risk evaluation system of capacity planning was provided in...

Abstract
Keywords
Introduction
Improved Fault Tree Analysis Process
Risk Factors Identification of Excess
Capacity Forecasting
Conclusion
Acknowledgments
References
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