International Conference on Electronics, Information and Communication Engineering (EICE 2012)
132 Identification of Risk Factors for Capacity Planning in Semiconductor Manufacturing
Download citation file:
Capacity planning in semiconductor manufacturing is very complex due to numerous variables and constraints. The identification of risk factors for capacity forecasting is a bottleneck of capacity planning. This paper describes key methodologies to solve the intricate problems. On the basis of the given tops event and bottom events, the fault tree of excess capacity forecasting was built. Then it was qualitatively analyzed with artificial deductive method, and was quantitatively analyzed with computer-aided method. Finally, the process of risk identification and risk factors of excess capacity forecasting were obtained, and the risk evaluation system of capacity planning was provided in...