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ASME Press Select Proceedings
International Conference on Electronics, Information and Communication Engineering (EICE 2012)Available to Purchase
By
Garry Lee
Garry Lee
Information Engineering Research Institute
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ISBN:
9780791859971
No. of Pages:
1008
Publisher:
ASME Press
Publication date:
2012

Magnetic precision stage is easy to realize micromotion with high resolution because a contact-free magnetic levitation technique is used between the moving plate and the driving part. The main parameters of drive circuit of a precision stage have been discussed. The power amplifier is designed based on L6234, the experimental results express that the drive method satisfied the demand of this stage's movement.

Abstract
Keywords
Introduction
The Structure Research of Magnetic Precision Stage
Driving Circuit Design
Control System Constitution of Magnetic Precision Stage
The Design of Power Amplifier
The Design of Overcurrent Protect Circuit
Experiments
Conclusions
References
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