One very effective approach to suppress hysteresis from the piezoelectric actuator is to use the charge control across the associated capacitance. The charge driver often uses an additional capacitor connected to the piezo-actuator in series for the charge sense feedback control. When this charge sense is used with a voltage drive for the charge control, the applied voltage will include two parts. The one is the voltage drop across the useful electro-mechanical part and effectively converted to the driving force, whereas the other part indicates the equivalent voltage drop due to the hysteresis. In our research, we noticed that it is possible to use a simple estimator as the hysteresis voltage observer and use it to precompensate for the voltage drop. Comparing to the conventional hysteresis suppression achieved by the closed-loop positional control, we show significant improvement of the control performance. For dynamic applications, we also proposed a combination of the Preisach model with the hysteresis estimator to better suppress the nonlinear behavior. A series of experiments were conducted to demonstrate the performance improvement of the proposed compensator. A 10 nm and 25 nm maximum tracking error can be maintained while tracking a staircase reference and a 30 Hz sinusoidal signal, respectively.

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