This paper presets three degrees of freedom (DOF) piezoelectric micropositioning stage. The stage is composed of a stack of piezodisk bender actuators actuated in such a way to prevent the end-effector from rotating; this way the end-effector can only translate along the x, y, and z axes. Thanks to its snake-like configuration, the system is capable of large displacements (of the order of 50 μm) with low driving voltages (of the order of 100 V). Several lumped-mass static and dynamic models of the device have been implemented. Static experimental results, which are in agreement with simulation data, confirmed the performances of the device. A dynamic model showed the natural frequencies of the mechanism. Also dynamic tests have been conducted in order to validate the dynamic model.
Static and Vibration Analyses of a Three-Dimensional Snake-Like Micropositioning Stage
Contributed by the Dynamic Systems Division of ASME for publication in the JOURNAL OF DYNAMIC SYSTEMS, MEASUREMENT, AND CONTROL. Manuscript received May 16, 2012; final manuscript received September 30, 2013; published online October 18, 2013. Assoc. Editor: Qingze Zou.
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Scuor, N., Gallina, P., and Giovagnoni, M. (October 18, 2013). "Static and Vibration Analyses of a Three-Dimensional Snake-Like Micropositioning Stage." ASME. J. Dyn. Sys., Meas., Control. January 2014; 136(1): 011017. https://doi.org/10.1115/1.4025606
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