Motivated by the interest to increase production throughputs of immersion lithography machines, wafers are scanned at increasingly high velocities and accelerations, which may result in liquid loss at the receding contact line. The dynamic characteristics of the immersion fluid with free boundary play an important role for fluid management system, and are concerned in various potential immersion unit designs. To offer intuitive insights into the dynamic effects of the immersion fluid due to scan speeds, a lumped-parameter model based on two-dimensional (2D) image data has been developed to characterize the 3D hydrodynamics of the immersion flow process. To validate the model, meniscus behavior information under dynamic conditions is extracted experimentally and analyzed using image processing techniques. The reduced model agrees qualitatively well with the experimental data.
Issue Section:
Research Papers
References
1.
Bonn
, D.
, Eggers
, J.
, Indekeu
, J.
, Meunier
, J.
, and Rolley
, E.
, 2009
, “Wetting and Spreading
,” Rev. Mod. Phys.
, 81
(2
), pp. 739
–805
.10.1103/RevModPhys.81.7392.
Blake
, T. D.
, Dobson
, R. A.
, and Ruschak
, K. J.
, 2004
, “Wetting at High Capillary Numbers
,” J. Colloid Interf. Sci.
, 279
(1
), pp. 198
–205
.10.1016/j.jcis.2004.06.0573.
Bertrand
, E.
, Bonn
, D.
, Broseta
, D.
, Dobbs
, H.
, Indekeu
, J. O.
, Meunier
, J.
, Ragil
, K.
, and Shahidzadeh
, N.
, 2002
, “Wetting of Alkanes on Water
,” J. Petrol. Sci. Eng.
, 33
(1–3
), pp. 217
–222
.10.1016/S0920-4105(01)00191-74.
Bergeron
, V.
, Bonn
, D.
, Martin
, J. Y.
, and Vovelle
, L.
, 2000
, “Controlling Droplet Deposition With Polymer Additives
,” Nature
, 405
(6788
), pp. 772
–775
.10.1038/350155255.
Tabeling
, P.
, 2005
, Introduction to Microfluidics
, Oxford University Press
, Oxford, UK
.6.
Bhattacharjee
, B.
, and Najjaran
, H.
, 2010
, “Simulation of Droplet Position Control in Digital Microfluidic Systems
,” ASME J. Dyn. Syst., Meas., Control
, 132
(1
), p. 014501
.10.1115/1.40000777.
Chen
, W. Y.
, Chen
, Y.
, Zou
, J.
, Fu
, X.
, Yang
, H. Y.
, Ruan
, X. D.
, and Gong
, G. F.
, 2009
, “Effect of Liquid Dispensing on Flow Field for Immersion Lithography
,” J. Vac. Sci. Technol. B
, 27
(5
), pp. 2192
–2199
.10.1116/1.32129168.
Owa
, S.
, and Nagasaka
, H.
, 2003
, “Immersion Lithography Exposure Tool Update
,” Immersion Lithography Workshop
, San Jose, CA
.9.
Mulkens
, J.
, Flagello
, D.
, Streefkerk
, B.
, and Graeupner
, P.
, 2004
, “Benefits and Limitations of Immersion Lithography
,” J. Microlithogr. Microfabr. Microsyst.
, 3
(1
), pp. 104
–114
.10.1117/1.163676810.
El-Morsi
, M.
, Nellis
, G.
, Schuetter
, S.
, Van Peski
, C.
, and Grenville
, A.
, 2005
, “Full Wafer Simulation of Immersion Fluid Heating
,” J. Vac. Sci. Technol. B
, 23
(6
), pp. 2596
–2600
.10.1116/1.209109111.
Burnett
, H.
, Shedd
, T.
, Nellis
, G.
, El-Morsi
, M.
, Engelstad
, R.
, Garoff
, S.
, and Varanasi
, K.
, 2005
, “Control of the Receding Meniscus in Immersion Lithography
,” J. Vac. Sci. Technol. B
, pp. 2611
–2616
.10.1116/1.209096812.
Schuetter
, S.
, Shedd
, T.
, Doxtator
, K.
, Nellis
, G.
, Van Peski
, C.
, Grenville
, A.
, Lin
, S. H.
, and Owe-Yang
, D. C.
, 2006
, “Measurements of the Dynamic Contact Angle for Conditions Relevant To Immersion Lithography
,” J. Microlithogr. Microfabr. Microsyst.
, 5
(2
), p. 023002
.10.1117/1.219854013.
Schuetter
, S. D.
, Shedd
, T. A.
, and Nellis
, G. F.
, 2007
, “Prediction of the Velocity at Which Liquid Separates From a Moving Contact Line
,” J. Micro-Nanolithogr. MEMS MOEMS
, 6
(2
), p. 023003
.10.1117/1.272749014.
Harder
, P. M.
, and Shedd
, T. A.
, 2008
, “Improved Model for Liquid Loss at a Dynamic Contact Line Including Behaviors of High-Index Fluids
,” J. Micro-Nanolithogr. MEMS MOEMS
, 7
(3
), p. 033002
.10.1117/1.296421415.
Winkels
, K. G.
, Peters
, I. R.
, Evangelista
, F.
, Riepen
, M.
, Daerr
, A.
, Limat
, L.
, and Snoeijer
, J. H.
, 2011
, “Receding Contact Lines: From Sliding Drops to Immersion Lithography
,” Eur. Phys. J. –Spec. Top.
, 192
(1
), pp. 195
–205
.10.1140/epjst/e2011-01374-616.
Kim
, H.
, Grosse
, S.
, Elsinga
, G. E.
, and Westerweel
, J.
, 2011
, “Full 3D-3C Velocity Measurement Inside a Liquid Immersion Droplet
,” Exp. Fluids
, 51
(2
), pp. 395
–405
.10.1007/s00348-011-1053-y17.
Bush
, J. W. M.
, and Aristoff
, J. M.
, 2003
, “The Influence of Surface Tension on the Circular Hydraulic Jump
,” J. Fluid Mech.
, 489
, pp. 229
–238
.10.1017/S002211200300515918.
Munson
, B. R.
, Young
, D. F.
, Okiishi
, T. H.
, and Huebsch
, W. W.
, 2009
, Fundamentals of Fluid Mechanics
, J. Wiley & Sons
, Hoboken, NJ
.19.
Chen
, Y.
, Lee
, K. M.
, and Fu
, X.
, 2011
, “Effect of Upper Surface Characteristics on Meniscus Stability in Immersion Flow Field
,” Microelectron. Eng.
, 88
(8
), pp. 1939
–1943
.10.1016/j.mee.2011.02.04520.
Gonzalez
, R. C.
, Woods
, R. E.
, and Eddins
, S. L.
, 2009
, Digital Image Processing Using MATLAB
, Gatesmark Pub.
, Knoxville, TN
.21.
Chapra
, S. C.
, and Canale
, R. P.
, 2010
, Numerical Methods for Engineers
, McGraw-Hill Higher Education
, Boston
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