In this work, we investigate the stability and integrity of parallel-plate microelectromechanical systems resonators using a delayed feedback controller. Two case studies are investigated: a capacitive sensor made of cantilever beams with a proof mass at their tip and a clamped-clamped microbeam. Dover-cliff integrity curves and basin-of-attraction analysis are used for the stability assessment of the frequency response of the resonators for several scenarios of positive and negative gain in the controller. It is found that in the case of a positive gain, a velocity or a displacement feedback controller can be used to effectively enhance the stability of the resonators. This is confirmed by an increase in the area of the basin of attraction of the resonator and in shifting the Dover-cliff curve to higher values. On the other hand, it is shown that a negative gain can significantly weaken the stability and integrity of the resonators. This can be of useful use in MEMS for actuation applications, such as in the case of capacitive switches, to lower the activation voltage of these devices and to ensure their trigger under all initial conditions.
Skip Nav Destination
e-mail: myounis@binghamton.edu
Article navigation
Research Papers
Integrity Analysis of Electrically Actuated Resonators With Delayed Feedback Controller
Fadi Alsaleem,
Fadi Alsaleem
Microstaq Inc.
, Austin, TX 78744-1052
Search for other works by this author on:
Mohammad I. Younis
Mohammad I. Younis
Department of Mechanical Engineering,
e-mail: myounis@binghamton.edu
State University of New York at Binghamton
, Binghamton, NY 13902
Search for other works by this author on:
Fadi Alsaleem
Microstaq Inc.
, Austin, TX 78744-1052
Mohammad I. Younis
Department of Mechanical Engineering,
State University of New York at Binghamton
, Binghamton, NY 13902e-mail: myounis@binghamton.edu
J. Dyn. Sys., Meas., Control. May 2011, 133(3): 031011 (8 pages)
Published Online: March 25, 2011
Article history
Received:
July 5, 2010
Revised:
September 12, 2010
Online:
March 25, 2011
Published:
March 25, 2011
Citation
Alsaleem, F., and Younis, M. I. (March 25, 2011). "Integrity Analysis of Electrically Actuated Resonators With Delayed Feedback Controller." ASME. J. Dyn. Sys., Meas., Control. May 2011; 133(3): 031011. https://doi.org/10.1115/1.4003262
Download citation file:
Get Email Alerts
Offline and online exergy-based strategies for hybrid electric vehicles
J. Dyn. Sys., Meas., Control
Optimal Control of a Roll-to-Roll Dry Transfer Process With Bounded Dynamics Convexification
J. Dyn. Sys., Meas., Control (May 2025)
In-Situ Calibration of Six-Axis Force/Torque Transducers on a Six-Legged Robot
J. Dyn. Sys., Meas., Control (May 2025)
Active Data-enabled Robot Learning of Elastic Workpiece Interactions
J. Dyn. Sys., Meas., Control
Related Articles
Compensation of Time-Varying Input and State Delays for Nonlinear Systems
J. Dyn. Sys., Meas., Control (January,2012)
Transparency and Stability Robustness in Two-Channel Bilateral Telemanipulation
J. Dyn. Sys., Meas., Control (September,2001)
Delay-Independent Observer-Based Control for a Class of Neutral Systems
J. Dyn. Sys., Meas., Control (December,2004)
Oscillation Control of Quay-Side Container Cranes Using Cable-Length Manipulation
J. Dyn. Sys., Meas., Control (March,2007)
Related Proceedings Papers
Related Chapters
Pre-Accidental Situations Highlighted by RECUPERARE Method and Data (PSAM-0029)
Proceedings of the Eighth International Conference on Probabilistic Safety Assessment & Management (PSAM)
A Design Method for Modified Smith Predictors for Non-Minimum-Phase Time-Delay Plants with Feedback Connected Multiple Time-Delays
Intelligent Engineering Systems through Artificial Neural Networks Volume 18
QP Based Encoder Feedback Control
Robot Manipulator Redundancy Resolution