Control can enable high-bandwidth nanopositioning needed to increase the operating speed of scanning probe microscopes (SPMs). High-speed SPMs can substantially impact the throughput of a wide range of emerging nanosciences and nanotechnologies. In particular, inversion-based control can find the feedforward input needed to account for the positioning dynamics and, thus, achieve the required precision and bandwidth. This article reviews inversion-based feedforward approaches used for high-speed SPMs such as optimal inversion that accounts for model uncertainty and inversion-based iterative control for repetitive applications. The article establishes connections to other existing methods such as zero-phase-error-tracking feedforward and robust feedforward. Additionally, the article reviews the use of feedforward in emerging applications such as SPM-based nanoscale combinatorial-science studies, image-based control for subnanometer-scale studies, and imaging of large soft biosamples with SPMs.
A Review of Feedforward Control Approaches in Nanopositioning for High-Speed SPM
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Clayton, G. M., Tien, S., Leang, K. K., Zou, Q., and Devasia, S. (October 28, 2009). "A Review of Feedforward Control Approaches in Nanopositioning for High-Speed SPM." ASME. J. Dyn. Sys., Meas., Control. November 2009; 131(6): 061101. https://doi.org/10.1115/1.4000158
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