Control can enable high-bandwidth nanopositioning needed to increase the operating speed of scanning probe microscopes (SPMs). High-speed SPMs can substantially impact the throughput of a wide range of emerging nanosciences and nanotechnologies. In particular, inversion-based control can find the feedforward input needed to account for the positioning dynamics and, thus, achieve the required precision and bandwidth. This article reviews inversion-based feedforward approaches used for high-speed SPMs such as optimal inversion that accounts for model uncertainty and inversion-based iterative control for repetitive applications. The article establishes connections to other existing methods such as zero-phase-error-tracking feedforward and robust feedforward. Additionally, the article reviews the use of feedforward in emerging applications such as SPM-based nanoscale combinatorial-science studies, image-based control for subnanometer-scale studies, and imaging of large soft biosamples with SPMs.
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e-mail: garrett.clayton@villanova.edu
e-mail: sctien@mail.ncku.edu.tw
e-mail: qzzou@iastate.edu
e-mail: devasia@u.washington.edu
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November 2009
Dynamic Modeling Control And Manipulation At The Nanoscale
A Review of Feedforward Control Approaches in Nanopositioning for High-Speed SPM
Garrett M. Clayton,
Garrett M. Clayton
Department of Mechanical Engineering,
e-mail: garrett.clayton@villanova.edu
Villanova University
, Villanova, PA 19085
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Szuchi Tien,
Szuchi Tien
Department of Mechanical Engineering,
e-mail: sctien@mail.ncku.edu.tw
National Cheng Kung University
, Tainan 701, Taiwan
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Qingze Zou,
Qingze Zou
Department of Mechanical Engineering,
e-mail: qzzou@iastate.edu
Iowa State University
, Ames, IA 50011
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Santosh Devasia
Santosh Devasia
Department of Mechanical Engineering,
e-mail: devasia@u.washington.edu
University of Washington
, Seattle, WA 98195
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Garrett M. Clayton
Department of Mechanical Engineering,
Villanova University
, Villanova, PA 19085e-mail: garrett.clayton@villanova.edu
Szuchi Tien
Department of Mechanical Engineering,
National Cheng Kung University
, Tainan 701, Taiwane-mail: sctien@mail.ncku.edu.tw
Kam K. Leang
Qingze Zou
Department of Mechanical Engineering,
Iowa State University
, Ames, IA 50011e-mail: qzzou@iastate.edu
Santosh Devasia
Department of Mechanical Engineering,
University of Washington
, Seattle, WA 98195e-mail: devasia@u.washington.edu
J. Dyn. Sys., Meas., Control. Nov 2009, 131(6): 061101 (19 pages)
Published Online: October 28, 2009
Article history
Received:
February 6, 2008
Revised:
April 28, 2009
Published:
October 28, 2009
Citation
Clayton, G. M., Tien, S., Leang, K. K., Zou, Q., and Devasia, S. (October 28, 2009). "A Review of Feedforward Control Approaches in Nanopositioning for High-Speed SPM." ASME. J. Dyn. Sys., Meas., Control. November 2009; 131(6): 061101. https://doi.org/10.1115/1.4000158
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