This paper examines control strategies for electrostatically actuated microelectromechanical systems (MEMS), with the goals of using feasible measurements to eliminate the pull-in bifurcation, robustly stabilize any desired operating point in the capacitive gap, decrease settling time, and reduce overshoot. We show that input-output linearization, passivity-based design, and the theory of port-controlled Hamiltonian systems lead naturally to static output feedback of device charge. This formalizes and extends previously reported results from the MEMS literature. Further analysis suggests that significantly improving transient behavior in lightly damped MEMS requires dynamic estimation of electrode velocity. We implement output-feedback control using a reduced-order nonlinear observer. Simulations predict greatly improved transient behavior, and large reductions in control voltage.
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e-mail: sanjeeva.maithripala@ttu.edu
e-mail: jordan.berg@ttu.edu
e-mail: wdayawan@ttu.edu
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September 2005
Technical Papers
Control of an Electrostatic Microelectromechanical System Using Static and Dynamic Output Feedback
D. H. S. Maithripala,
D. H. S. Maithripala
Department of Mechanical Engineering,
e-mail: sanjeeva.maithripala@ttu.edu
Texas Tech University
, Lubbock, TX 79409
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Jordan M. Berg,
Jordan M. Berg
Department of Mechanical Engineering,
e-mail: jordan.berg@ttu.edu
Texas Tech University
, Lubbock, TX 79409
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W. P. Dayawansa
W. P. Dayawansa
Department of Mathematics and Statistics,
e-mail: wdayawan@ttu.edu
Texas Tech University
, Lubbock, TX 79409
Search for other works by this author on:
D. H. S. Maithripala
Department of Mechanical Engineering,
Texas Tech University
, Lubbock, TX 79409e-mail: sanjeeva.maithripala@ttu.edu
Jordan M. Berg
Department of Mechanical Engineering,
Texas Tech University
, Lubbock, TX 79409e-mail: jordan.berg@ttu.edu
W. P. Dayawansa
Department of Mathematics and Statistics,
Texas Tech University
, Lubbock, TX 79409e-mail: wdayawan@ttu.edu
J. Dyn. Sys., Meas., Control. Sep 2005, 127(3): 443-450 (8 pages)
Published Online: August 17, 2004
Article history
Received:
February 13, 2004
Revised:
July 20, 2004
Accepted:
August 17, 2004
Citation
Maithripala, D. H. S., Berg, J. M., and Dayawansa, W. P. (August 17, 2004). "Control of an Electrostatic Microelectromechanical System Using Static and Dynamic Output Feedback." ASME. J. Dyn. Sys., Meas., Control. September 2005; 127(3): 443–450. https://doi.org/10.1115/1.1985443
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