This paper presents a new adaptive operation strategy that can identify and, in an adaptive fashion, compensate for most fabrication defects and perturbations affecting the behavior of a MEMS z-axis gyroscope. The convergence and resolution analysis presented in the paper shows that the proposed adaptive controlled scheme offers several advantages over conventional modes of operation. These advantages include a larger operational bandwidth, absence of zero-rate output, self-calibration and a large robustness to parameter variations, which are caused by fabrication defects and ambient conditions.
New Adaptive Mode of Operation for MEMS Gyroscopes
Contributed by the Dynamic Systems, Measurement, and Control Division of THE AMERICAN SOCIETY OF MECHANICAL ENGINEERS for publication in the ASME JOURNAL OF DYNAMIC SYSTEMS, MEASUREMENT, AND CONTROL. Manuscript received April 25, 2002; final revision, September 27, 2003. Review conducted by: F. Ghorbel.
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Park, S., and Horowitz, R. (March 11, 2005). "New Adaptive Mode of Operation for MEMS Gyroscopes ." ASME. J. Dyn. Sys., Meas., Control. December 2004; 126(4): 800–810. https://doi.org/10.1115/1.1849252
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