The piezoelectric actuator (PA) has been used for precision positioning from micrometer down to nanometer scale. In this paper, a spring-mounted PA is designed to achieve a high accuracy and self-moving ability in precision positioning motion. The contact force between the hammer and the self-moving stage, and the friction force of Leuven’s model caused between the grinded groove and the self-moving stage are considered. The governing equations of the system are formulated by using the finite-element method (FEM). The numerical solutions are provided to compare with the experimental results, and demonstrate the well agreement of the present theoretical formulations.
Dynamic Responses of a Self-Moving Precision Positioning Stage Impacted by a Spring-Mounted Piezoelectric Actuator
Contributed by the Dynamic Systems, Measurement, and Control Division of THE AMERICAN SOCIETY OF MECHANICAL ENGINEERS for publication in the ASME JOURNAL OF DYNAMIC SYSTEMS, MEASUREMENT, AND CONTROL. Manuscript received by the ASME Dynamic Systems and Control Division Sept. 11, 2002; final revision, June 17, 2003. Associate Editor: Tu.
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Fung,, R., Liu, , Y., Huang, , T., and Higuchi, , T. (January 29, 2004). "Dynamic Responses of a Self-Moving Precision Positioning Stage Impacted by a Spring-Mounted Piezoelectric Actuator ." ASME. J. Dyn. Sys., Meas., Control. December 2003; 125(4): 658–661. https://doi.org/10.1115/1.1636778
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