In this paper we will present a model for an array of microcantilevers that are used in Atomic Force Microscopy and nano-scale manufacturing. The microcantilevers are connected to each other through a common base, and are individually actuated. The sensors are also integrated on each microcantilever. We consider the problem of controlling a tightly packed array of identical microcantilevers that are dynamically coupled. This system is an example of a spatially-invariant system with a distributed array of sensors and actuators. We exploit the spatial invariance of the problem to design optimal ℋ2 controllers for this array. An analytic expression for the optimal controller is derived in the transformed domain, and estimates of the coupling range of the controller is obtained.
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December 1999
Technical Papers
Optimal Control of Arrays of Microcantilevers
Mariateresa Napoli
,
Mariateresa Napoli
Department of Mechanical Engineering, University of California, Santa Barbara, CA 93106
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Bassam Bamieh
,
Bassam Bamieh
Department of Mechanical Engineering, University of California, Santa Barbara, CA 93106
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Mohammed Dahleh
Mohammed Dahleh
Department of Mechanical Engineering, University of California, Santa Barbara, CA 93106
dahleh@engineering.ucsb.edu
Search for other works by this author on:
Mariateresa Napoli
Department of Mechanical Engineering, University of California, Santa Barbara, CA 93106
Bassam Bamieh
Department of Mechanical Engineering, University of California, Santa Barbara, CA 93106
Mohammed Dahleh
Department of Mechanical Engineering, University of California, Santa Barbara, CA 93106
dahleh@engineering.ucsb.edu
J. Dyn. Sys., Meas., Control. Dec 1999, 121(4): 686-690 (5 pages)
Published Online: December 1, 1999
Article history
Received:
June 22, 1998
Online:
December 3, 2007
Citation
Napoli, M., Bamieh, B., and Dahleh, M. (December 1, 1999). "Optimal Control of Arrays of Microcantilevers." ASME. J. Dyn. Sys., Meas., Control. December 1999; 121(4): 686–690. https://doi.org/10.1115/1.2802535
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