A microtesting system manufactured by the LIGA process (Becker et al, 1986) combined with a new sacrificial structure technique is presented. The system is used for bending experiments to determine the Young’s modulus of electroplated materials used in the LIGA process. The force needed to bend the specimen is generated by a pneumatically driven microactuator. This actuator is able to produce forces in the range of several 10 mN and displacements of 50 μm and more. Bending of the specimen is detected optically. With a trap for adhesive, adhesive bonding can be applied to cover the actuator chamber with a glass platelet. For the fluidic supply of the actuator, hoses are bonded into microtunnels (140 μm diameter) running parallel to the substrate and passing through the sidewalls of the actuator housing. The microtunnels are produced by the sacrificial structure technique.

1.
Becker
E. W.
,
Ehrfeld
W.
,
Hagmann
P.
,
Maner
A.
, and
Mu¨nchmeyer
D.
,
1986
, “
Fabrication of Microstructures with High Aspect Ratios and Great Structural Heights by Synchrotron Radiation Lithography
,”
Microel. Eng.
, Vol.
4
, pp.
35
56
.
2.
Go¨ttert, J., Mohr, J., Mu¨ller, C, and Sauter, H., 1992, “Coupling Elements for Multimode Fibers by the LIGA Process,” Proc. MICRO-SYSTEM Technologies 92, Berlin, Germany, pp. 297–307.
3.
Guckel, H., Skrobis, K. J., Christenson, T. R., Klein, J., Han, S., Choi, B., and Lovell, E. G., 1991, “On the Application of Deep X-Ray Lithography with Sacrificial Layers to Sensor and Actuator Construction,” Proc. TRANSDVCRS 91, San Francisco, pp. 393–396.
4.
Johansson
S.
,
Schweitz
J.-A.
,
Tenerz
L.
, and
Tiren
J.
,
1988
, “
Fracture Testing of Silicon Microelements in situ in a Scanning Electron Microscope
,”
J. Appl. Phys.
, Vol.
63
, No.
10
, pp.
4799
4803
.
5.
Maas, D., Bu¨stgens, B., Fahrenberg, J., Keller, W., and Seidel, D., 1994, “Application of Adhesive Bonding for Integration of Microfluidic Components,” Proc. ACTUATOR 94, Bremen, Germany, pp. 75–78.
6.
Mohr, J., Burbaum, C., Bley, P., Menz, W., Wallrabe, V., 1990, “Movable Microstructures Manufactured by the LIGA-Process as Basic Elements for Microsystems” H. Reichl, ed., MICRO-SYSTEM Technologies 90, VDE-Verlag, Berlin, pp. 529–537.
7.
Ruther, P., Bacher, W., Feit, K., Heckele, M., and Weindel, K., 1994, “LIGA-made Pneumatically Driven Micro-actuator for Use in a Micro Testing System,” Proc. MICRO-SYSTEM Technologies 94, Berlin, Germany, pp. 899–906.
8.
Weihs
T. P.
,
Hong
S.
,
Bravman
J. C.
, and
Nix
W. D.
,
1988
, “
Mechanical Deflection of Cantilever Microbeams: A New Technique for Testing the Mechanical Properties of Thin Films
,”
J. Mater, Res.
, Vol.
3
, No.
5
, pp.
931
942
.
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