A lumped parameter model of the Czochralski crystal growth process is proposed that captures the dominant nonlinear dynamics, internal coupling, and disturbance structure. Conventional and advanced actuators are modeled. The dynamic characteristics of the interface shape and input/outputs that limit the achievable controller performance are identified.
Modeling and Dynamic Characterization of the Czochralski Crystal Growth Process
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Gevelber, M. A., and Stephanopoulos, G. (March 1, 1993). "Modeling and Dynamic Characterization of the Czochralski Crystal Growth Process." ASME. J. Dyn. Sys., Meas., Control. March 1993; 115(1): 109–114. https://doi.org/10.1115/1.2897384
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