This paper investigates the voltage–amplitude response of soft alternating current (AC) electrostatically actuated micro-electro-mechanical system (MEMS) clamped circular plates for sensing applications. The case of soft AC voltage of frequency near half natural frequency of the plate is considered. Soft AC produces small to very small amplitudes away from resonance zones. Nearness to half natural frequency results in primary resonance of the system, which is investigated using the method of multiple scales (MMS) and numerical simulations using reduced order model (ROM) of seven terms (modes of vibration). The system is assumed to be weakly nonlinear. Pull-in instability of the voltage–amplitude response and the effects of detuning frequency and damping on the response are reported.
Voltage Response of Primary Resonance of Electrostatically Actuated MEMS Clamped Circular Plate Resonators
Contributed by the Design Engineering Division of ASME for publication in the JOURNAL OF COMPUTATIONAL AND NONLINEAR DYNAMICS. Manuscript received January 31, 2015; final manuscript received March 22, 2016; published online May 13, 2016. Assoc. Editor: Daniel J. Segalman.
The United States Government retains, and by accepting the article for publication, the publisher acknowledges that the United States Government retains a nonexclusive, paid-up, irrevocable, worldwide license to publish or reproduce the published form of this work, or allow others to do so, for United States government purposes.
- Views Icon Views
- Share Icon Share
- Cite Icon Cite
- Search Site
Caruntu, D. I., and Oyervides, R. (May 13, 2016). "Voltage Response of Primary Resonance of Electrostatically Actuated MEMS Clamped Circular Plate Resonators." ASME. J. Comput. Nonlinear Dynam. July 2016; 11(4): 041021. https://doi.org/10.1115/1.4033252
Download citation file:
- Ris (Zotero)
- Reference Manager