... implantation reactive ion etching plasma etching James M. Heddleson, Mark W. Horn, and Stephen J. Fonash DRY ETCHING OF ION IMPU^NTED SIUCON: ELECTRICAL EFFECTS REFERENCE: Heddleson, J. M., Horn, M. W., and Fonash, S. J., "Dry Etching of Ion Implanted Silicon: Electrical Effects", Semiconductor...

... Reactive ion etching (RIE) has become a necessary tool in much of silicon device manufacturing. When employing this important etching technique, one must be aware that its use can produce damage and contamination. The types of damage and contamination that can result from RIE are discussed...