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Keywords: plasma etching
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eBook Chapter
Series: ASTM Selected Technical Papers
Publisher: ASTM International
Published: 1998
ISBN-10: 0-8031-2482-1
ISBN: 978-0-8031-2482-0
... The wear of ultra-high molecular weight polyethylene is one of the most important factors in the longevity of total joint replacement prostheses. This paper investigates the morphological changes in UHMWPE induced by plastic deformation and wear. A plasma etching technique was used to reveal...
eBook Chapter
Series: ASTM Selected Technical Papers
Publisher: ASTM International
Published: 1989
ISBN-10: 0-8031-1273-4
ISBN: 978-0-8031-1273-5
... implantation reactive ion etching plasma etching James M. Heddleson, Mark W. Horn, and Stephen J. Fonash DRY ETCHING OF ION IMPU^NTED SIUCON: ELECTRICAL EFFECTS REFERENCE: Heddleson, J. M., Horn, M. W., and Fonash, S. J., "Dry Etching of Ion Implanted Silicon: Electrical Effects", Semiconductor...
eBook Chapter
Series: ASTM Selected Technical Papers
Publisher: ASTM International
Published: 1988
ISBN-10: 0-8031-4479-2
ISBN: 978-0-8031-4479-8
... The laser damage behaviour of germanium is examined in relation to surface preparation methods including alumina polishing, “Syton” polishing, diamond machining and plasma etching. Data on laser damage threshold (LDT), damage morphology, surface absorption, surface roughness...
eBook Chapter
Series: ASTM Selected Technical Papers
Publisher: ASTM International
Published: 1987
ISBN-10: 0-8031-0459-6
ISBN: 978-0-8031-0459-4
... of device performance show that assessment of FET characteristics can provide a valuable complement to diode measurements and surface analysis. gallium arsenide plasma damage plasma etching RIE Keith C. Vanner, John R. Cockrlll, James A. Turner THE EFFECTS OF PLASMA PROCESSING OF DIELECTRIC...