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Keywords: plasma damage
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eBook Chapter
Series: ASTM Selected Technical Papers
Publisher: ASTM International
Published: 2000
ISBN-10: 0-8031-2615-8
ISBN: 978-0-8031-2615-2
... nm) oxide development is also presented. mercury probe mercury gate gate dielectric plasma damage surface cleaning metal contamination ultra-thin oxide Gilbert A. GruberI and Robert J. Hillard2 Characterization of Gate Dielectrics with Mercury Gate MOS Current-Voltage Measurements...
eBook Chapter
Series: ASTM Selected Technical Papers
Publisher: ASTM International
Published: 2000
ISBN-10: 0-8031-2615-8
ISBN: 978-0-8031-2615-2
... on the magnitude of the stress induced charging damage. charge-to-breakdown trap generation stress induced leakage current plasma damage antenna transistors thin oxide damage oxide breakdown model Gennadi Bersuker1and James Werking1 Localized Charging Damage in Thin Oxides Reference: Bersuker, G...
eBook Chapter
Series: ASTM Selected Technical Papers
Publisher: ASTM International
Published: 1987
ISBN-10: 0-8031-0459-6
ISBN: 978-0-8031-0459-4
... of device performance show that assessment of FET characteristics can provide a valuable complement to diode measurements and surface analysis. gallium arsenide plasma damage plasma etching RIE Keith C. Vanner, John R. Cockrlll, James A. Turner THE EFFECTS OF PLASMA PROCESSING OF DIELECTRIC...