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Keywords: hydrogen/deuterium
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eBook Chapter
Series: ASTM Selected Technical Papers
Publisher: ASTM International
Published: 1989
ISBN-10: 0-8031-1273-4
ISBN: 978-0-8031-1273-5
... preferentially “pairs” with boron in a compensated n-type environment. The second is that hydrogen deactivates boron acceptors not only in the absence of free holes but even when the Fermi level is near the conduction band edge. dry etching boron deactivation ion beam etching hydrogen/deuterium...
