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Keywords: dry etching
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eBook Chapter
Series: ASTM Selected Technical Papers
Publisher: ASTM International
Published: 1989
ISBN-10: 0-8031-1273-4
ISBN: 978-0-8031-1273-5
... control), through substrate via holes (to reduce interconnection inductances) and scribe-line etching (for yield enhancement). Reproducible dry etch processes have been developed for these steps. However, the diversity of the process constraints imposed by these fabrication steps has led to a number...
eBook Chapter
Series: ASTM Selected Technical Papers
Publisher: ASTM International
Published: 1989
ISBN-10: 0-8031-1273-4
ISBN: 978-0-8031-1273-5
... In this paper we examine the effect of dry etching on p-type and n-type material implanted with 11 B + at 100 keV to doses of 1E12, 1E13, 1E14, 1E15, and 1E16 cm −2 . Hydrogen-containing etch chemistries and typical etch parameters are simulated by Ion Beam Etching with 100% deuterium. We show...
eBook Chapter
Book: Semiconductor Processing
Series: ASTM Selected Technical Papers
Publisher: ASTM International
Published: 1984
ISBN-10: 0-8031-0403-0
ISBN: 978-0-8031-0403-7
... Dry etching of silicon, silicon dioxide and photoresist has been studied using NF 3 plasmas diluted with helium and argon in both reactive ion etch and plasma etch modes. NF 3 concentrations in Ar and He ranged from 10 to 80% for these experiments. Power densities varied from 0.02 to 0.8W/cm 2...