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Keywords: UHV films
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Series: ASTM Selected Technical Papers
Publisher: ASTM International
Published: 1988
ISBN-10: 0-8031-4481-4
ISBN: 978-0-8031-4481-1
... reflectivity performance of aluminum films freshly deposited in our UHV system does not degrade appreciably when stored for four weeks in a helium atmosphere of 2 × 10 -9 Torr. aluminum ellipsometry oxidation reflectance silicon UHV films XUV Optical Measurements of Surface Oxide Layer...
