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Keywords: MOS transistor
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eBook Chapter
Series: ASTM Selected Technical Papers
Publisher: ASTM International
Published: 1987
ISBN-10: 0-8031-0459-6
ISBN: 978-0-8031-0459-4
... strength can be drastically improved. mobility ion beam damage surface roughness MOS transistor Han-Sheng Lee THE ELECTRICAL PROPERTIES OF MOS TRANSISTORS FABRICATED WITH DIRECT ION BEAM NITRIDATION REFERENCE : Lee, H.S., "The Electrical Properties of MOS Transistors Fabricated With Direct Ion...