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Keywords: CMOS
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eBook Chapter
Series: ASTM Selected Technical Papers
Publisher: ASTM International
Published: 2001
ISBN-10: 0-8031-2889-4
ISBN: 978-0-8031-2889-7
... We have developed a technique to determine the local Young's moduli of the thin films within a composite stack of CMOS films, without accessing the individual layers during processing. By fabricating cantilevers of various combinations of field oxide, polysilicon 1, gate oxide, polysilicon 2...
