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ASTM Selected Technical Papers
Mechanical Properties of Structural Films
By
CL Muhlstein,
CL Muhlstein
editor
1
University of California at Berkeley
?Berkeley, CA
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ISBN-10:
0-8031-2889-4
ISBN:
978-0-8031-2889-7
No. of Pages:
341
Publisher:
ASTM International
Publication date:
2001
Description
Written by an international group of experts from six countries.
STP 1413 is one of the most complete assemblies of papers on the characterization of the mechanical properties of structural films available to date. In the rapidly developing field of structural films, this new ASTM publication is a milestone in the engineering of these materials systems and their characterization.
22 papers cover four major areas of structural films characterization:
• Fracture and Fatigue
• Elastic Behavior and Residual Stress
• Tensile Testing
• Thermomechanical, Wear, and Radiation Damage
Muhlstein, C, & Brown, S.
Mechanical Properties of Structural Films. ISBN-10: 0-8031-2889-4
ISBN: 978-0-8031-2889-7
No. of Pages: 341
ISBN (electronic): 978-0-8031-5458-2
Publisher: ASTM International
Published: 2001
Download citation file:
Table of Contents
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Surface Topology and Fatigue in Si MEMS StructuresBySM Allameh,SM Allameh1Research staff scientist,Princeton University,Olden St., Princeton, NJ 08544.Search for other works by this author on:B Gally,B Gally2Engineer, Exponent,21 Strathmore Rd., Natick, MA 01760.Search for other works by this author on:S Brown,S Brown3Director, Exponent,21 Strathmore Rd., Natick, MA 01760.Search for other works by this author on:WO SoboyejoWO Soboyejo4Professor,Princeton University,Olden St., Princeton, NJ 08544.Search for other works by this author on:
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Cross Comparison of Direct Strength Testing Techniques on Polysilicon FilmsByDA LaVan,DA LaVan1Massachusetts Institute of Technology,Cambridge, MA; andChildren's Hospital,Boston, MA.Search for other works by this author on:T Tsuchiya,T Tsuchiya2Toyota Central Research and Development Laboratories,Nagakute,.JapanSearch for other works by this author on:G Coles,G Coles3Department of Mechanical Engineering,The Johns Hopkins University,Baltimore, MD.Search for other works by this author on:WG Knauss,WG Knauss4Graduate,Aeronautical Laboratories, California Institute of Technology,Pasadena, CA.Search for other works by this author on:I Chasiotis,I Chasiotis4Graduate,Aeronautical Laboratories, California Institute of Technology,Pasadena, CA.Search for other works by this author on:D ReadD Read5Materials Reliability Division,National Institute of Standards and Technology,Boulder, CO.Search for other works by this author on:
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Fatigue and Fracture in Membranes for MEMS Power GenerationByDF Bahr,DF Bahr1Mechanical and Materials Engineering,Washington State University,Pullman, WA 99164.Search for other works by this author on:BT Crozier,BT Crozier1Mechanical and Materials Engineering,Washington State University,Pullman, WA 99164.Search for other works by this author on:CD Richards,CD Richards1Mechanical and Materials Engineering,Washington State University,Pullman, WA 99164.Search for other works by this author on:RF RichardsRF Richards1Mechanical and Materials Engineering,Washington State University,Pullman, WA 99164.Search for other works by this author on:
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Effects of Microstructure on the Strength and Fracture Toughness of Polysilicon: A Wafer Level Testing ApproachByR Ballarini,R Ballarini1Professor of Civil Engineering,Case Western Reserve University,Cleveland, Ohio 44106Search for other works by this author on:H Kahn,H Kahn2Researcher, Department of Materials Science and EngineeringSearch for other works by this author on:N Tayebi,N Tayebi3Graduate student, Department of Mechanical and Aerospace EngineeringSearch for other works by this author on:AH HeuerAH Heuer4Kyocera Professor of Materials Science and EngineeringSearch for other works by this author on:
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Fatigue Crack Growth of a Ni-P Amorphous Alloy Thin FilmByK Takashima,K Takashima1Associate professor, research associate, and professor, respectively,Precision and Intelligence Laboratory, Tokyo Institute of Technology,4259 Nagatsuta, Midori-ku, Yokohama 226-8503,.JapanSearch for other works by this author on:M Shimojo,M Shimojo1Associate professor, research associate, and professor, respectively,Precision and Intelligence Laboratory, Tokyo Institute of Technology,4259 Nagatsuta, Midori-ku, Yokohama 226-8503,.JapanSearch for other works by this author on:Y Higo,Y Higo1Associate professor, research associate, and professor, respectively,Precision and Intelligence Laboratory, Tokyo Institute of Technology,4259 Nagatsuta, Midori-ku, Yokohama 226-8503,.JapanSearch for other works by this author on:MV SwainMV Swain2Professor, Faculty of Dentistryand Department of Mechanical & Mechatronic Engineering,The University of Sydney,Australian Technology Park, Everleigh NSW 1430,.AustraliaSearch for other works by this author on:
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Direct Tension and Fracture Toughness Testing Using the Lateral Force Capabilities of a Nanomechanical Test SystemByDA LaVan,DA LaVan1Children's Hospital,Boston, MAandMassachusetts Institute of Technology,Cambridge, MA.Search for other works by this author on:K Jackson,K Jackson2Sandia National Laboratories,Albuquerque, NM.Search for other works by this author on:B McKenzie,B McKenzie2Sandia National Laboratories,Albuquerque, NM.Search for other works by this author on:SJ Glass,SJ Glass2Sandia National Laboratories,Albuquerque, NM.Search for other works by this author on:TA Friedmann,TA Friedmann2Sandia National Laboratories,Albuquerque, NM.Search for other works by this author on:JP Sullivan,JP Sullivan2Sandia National Laboratories,Albuquerque, NM.Search for other works by this author on:TE BuchheitTE Buchheit2Sandia National Laboratories,Albuquerque, NM.Search for other works by this author on:
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Fracture Behavior of Micro-Sized Specimens with Fatigue Pre-Crack Prepared from a Ni-P Amorphous Alloy Thin FilmByK Takashima,K Takashima1Associate professor, research associate, and professor, respectively,Precision and Intelligence Laboratory, Tokyo Institute of Technology,4259 Nagatsuta, Midori-ku, Yokohama 226-8503,.JapanSearch for other works by this author on:M Shimojo,M Shimojo1Associate professor, research associate, and professor, respectively,Precision and Intelligence Laboratory, Tokyo Institute of Technology,4259 Nagatsuta, Midori-ku, Yokohama 226-8503,.JapanSearch for other works by this author on:Y Higo,Y Higo1Associate professor, research associate, and professor, respectively,Precision and Intelligence Laboratory, Tokyo Institute of Technology,4259 Nagatsuta, Midori-ku, Yokohama 226-8503,.JapanSearch for other works by this author on:MV SwainMV Swain2Professor, Faculty of Dentistryand Department of Mechanical & Mechatronic Engineering,The University of Sydney,Australian Technology Park, Everleigh NSW 1430,.AustraliaSearch for other works by this author on:
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Integrated Platform for Testing MEMS Mechanical Properties at the Wafer Scale by the IMaP MethodologyByMP de Boer,MP de Boer1Sandia National Laboratories, PO Box 5800,Albuquerque, NM, 87185.Search for other works by this author on:NF Smith,NF Smith1Sandia National Laboratories, PO Box 5800,Albuquerque, NM, 87185.Search for other works by this author on:ND Masters,ND Masters1Sandia National Laboratories, PO Box 5800,Albuquerque, NM, 87185.Search for other works by this author on:MB Sinclair,MB Sinclair1Sandia National Laboratories, PO Box 5800,Albuquerque, NM, 87185.Search for other works by this author on:EJ PryputniewiczEJ Pryputniewicz2Worcestor Polytechnic Institute,Worcester, MA, 01609.Search for other works by this author on:
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Influence of the Film Thickness on Texture, Residual Stresses and Cracking Behavior of PVD Tungsten Coatings Deposited on a Ductile SubstrateByT Ganne,T Ganne1Centre Technique d'Arcueil,16 Bis avenue Prieur de la Côte d'Or, F-94114 ArcueilCedex.2Laboratoire de Mécanique des Solides, CNRS, Ecole Polytechnique,F-91128 PalaiseauCedex.Search for other works by this author on:G Farges,G Farges1Centre Technique d'Arcueil,16 Bis avenue Prieur de la Côte d'Or, F-94114 ArcueilCedex.Search for other works by this author on:J Crépin,J Crépin2Laboratoire de Mécanique des Solides, CNRS, Ecole Polytechnique,F-91128 PalaiseauCedex.Search for other works by this author on:R-M Pradeilles-Duval,R-M Pradeilles-Duval2Laboratoire de Mécanique des Solides, CNRS, Ecole Polytechnique,F-91128 PalaiseauCedex.Search for other works by this author on:A ZaouiA Zaoui2Laboratoire de Mécanique des Solides, CNRS, Ecole Polytechnique,F-91128 PalaiseauCedex.Search for other works by this author on:
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High Accuracy Measurement of Elastic Constants of Thin Films by Surface Brillouin ScatteringByMG Beghi,MG Beghi1INFM and Nuclear Engineering Department,Politecnico di Milano,Via Ponzio 34/3, 1-20133 Milano,.ItalySearch for other works by this author on:CE Bottani,CE Bottani1INFM and Nuclear Engineering Department,Politecnico di Milano,Via Ponzio 34/3, 1-20133 Milano,.ItalySearch for other works by this author on:R PastorelliR Pastorelli1INFM and Nuclear Engineering Department,Politecnico di Milano,Via Ponzio 34/3, 1-20133 Milano,.ItalySearch for other works by this author on:
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Effect of Nitrogen Feedgas Addition on the Mechanical Properties of Nano-Structured Carbon CoatingsBySA Catledge,SA Catledge1Research associate, Department of Physics,University of Alabama at Birmingham (UAB),1300 University Blvd., 310 Campbell Hall, Birmingham, AL 35294-1170.Search for other works by this author on:YK VohraYK Vohra2Professor of Physics, Department of Physics,University of Alabama at Birmingham (UAB),1300 University Blvd., 310 Campbell Hall, Birmingham, AL 35294-1170.Search for other works by this author on:
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Characterization of the Young's Modulus of CMOS Thin FilmsByN Hossain,N Hossain1Department of Civil and Environmental Engineering,University of California,Los Angeles, CA.Search for other works by this author on:JW Ju,JW Ju1Department of Civil and Environmental Engineering,University of California,Los Angeles, CA.Search for other works by this author on:B Warneke,B Warneke2Department of Electrical Engineering and Computer Sciences,University of California,Berkley, CA.Search for other works by this author on:KSJ PisterKSJ Pister2Department of Electrical Engineering and Computer Sciences,University of California,Berkley, CA.Search for other works by this author on:
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Derivation of Elastic Properties of Thin Films from Measured Acoustic VelocitiesByR Pastorelli,R Pastorelli1INFM and Nuclear Engineering Department,Politecnico di Milano,Via Ponzio 34/3, I-20133 Milano,.ItalySearch for other works by this author on:S Tarantola,S Tarantola2Institute for Systems, Informatics and Safety, EC Joint Research Centre, TP361,I-21020 Ispra(VA),.ItalySearch for other works by this author on:MG Beghi,MG Beghi1INFM and Nuclear Engineering Department,Politecnico di Milano,Via Ponzio 34/3, I-20133 Milano,.ItalySearch for other works by this author on:CE Bottani,CE Bottani1INFM and Nuclear Engineering Department,Politecnico di Milano,Via Ponzio 34/3, I-20133 Milano,.ItalySearch for other works by this author on:A SaltelliA Saltelli2Institute for Systems, Informatics and Safety, EC Joint Research Centre, TP361,I-21020 Ispra(VA),.ItalySearch for other works by this author on:
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Side-by-Side Comparison of Passive MEMS Strain Test Structures under Residual CompressionByND Masters,ND Masters1Sandia National Laboratories, PO Box 5800,Albuquerque, NM 871852Mechanical Eng. Dept,Brigham Young University,Provo, UT 84602.Search for other works by this author on:MP de Boer,MP de Boer1Sandia National Laboratories, PO Box 5800,Albuquerque, NM 87185Search for other works by this author on:BD Jensen,BD Jensen1Sandia National Laboratories, PO Box 5800,Albuquerque, NM 871853Mech. Eng. Dept.,University of Michigan,Ann Arbor, MI 48109-2125.Search for other works by this author on:MS Baker,MS Baker1Sandia National Laboratories, PO Box 5800,Albuquerque, NM 87185Search for other works by this author on:D KoesterD Koester4Cronos Integrated Microsystems,3026 Cornwallis Rd., Research Triangle Park, NC 27709.Search for other works by this author on:
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Mechanical Tests of Free-Standing Aluminum Microbeams for MEMS ApplicationByP Zhang,P Zhang1Ph.D. candidate,Stanford University, Dept. of Materials Science and Engineering,416 Escondido Mall, Bldg. 550, Rm. 555C, Stanford, CA 94305-2205.Search for other works by this author on:H-J Lee,H-J Lee2Member of technical staff,Lucent Technologies, Inc., P.O. Box 13396,2525 N. 12th St., Reading, PA 19612-3396.Search for other works by this author on:JC BravmanJC Bravman3Professor,Stanford University, Department of Materials Science and Engineering,416 Escondido Mall, Bldg. 550, Rm. 5501, Stanford, CA 94305-2205.Search for other works by this author on:
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Tensile Testing of Thin Films Using Electrostatic Force GripByT Tsuchiya,T Tsuchiya1Advanced Device Lab, Toyota Central R&D Labs., Inc.,Nagakute, Aichi 480-1192,.JapanSearch for other works by this author on:J SakataJ Sakata1Advanced Device Lab, Toyota Central R&D Labs., Inc.,Nagakute, Aichi 480-1192,.JapanSearch for other works by this author on:
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Tensile Tests of Various Thin FilmsByWN Sharpe, Jr,WN Sharpe, Jr1Decker Professor, Department of Mechanical Engineering,Johns Hopkins University.Search for other works by this author on:KM Jackson,KM Jackson2Graduate student, Department of Mechanical Engineering,Johns Hopkins University.Search for other works by this author on:G Coles,G Coles3Research assistant, Department of Mechanical Engineering,Johns Hopkins University.Search for other works by this author on:MA Eby,MA Eby4Undergraduate student, Department of Mechanical Engineering,Johns Hopkins University.Search for other works by this author on:RL EdwardsRL Edwards5Research engineer,Applied Physics Laboratory, Johns Hopkins University.Search for other works by this author on:
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Ductile Thin Foils of Ni3AlByM Demura,M Demura1National Research Institute for Metals,Sengen 1-2-1, Tsukuba, Ibaraki 305-0047,.JapanSearch for other works by this author on:K Kishida,K Kishida1National Research Institute for Metals,Sengen 1-2-1, Tsukuba, Ibaraki 305-0047,.JapanSearch for other works by this author on:O Umezawa,O Umezawa1National Research Institute for Metals,Sengen 1-2-1, Tsukuba, Ibaraki 305-0047,.JapanSearch for other works by this author on:EP George,EP George2Oak Ridge National Laboratory,Oak Ridge, TN 37831-6093.Search for other works by this author on:T HiranoT Hirano1National Research Institute for Metals,Sengen 1-2-1, Tsukuba, Ibaraki 305-0047,.JapanSearch for other works by this author on:
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Microstructural and Mechanical Characterization of Electrodeposited Gold Films4ByGS Long,GS Long1Department of Chemistry,Minnesota State University,Mankato, Mankato, MN.Search for other works by this author on:DT Read,DT Read2National Institute for Standards and Technology,Boulder, CO 80305.Search for other works by this author on:JD McColskey,JD McColskey2National Institute for Standards and Technology,Boulder, CO 80305.Search for other works by this author on:K CragoK Crago3Engineered by Design Inc.,Burnsville, MN.Search for other works by this author on:
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Determining the Strength of Brittle Thin Films for MEMSByGC Johnson,GC Johnson1Professor, Graduate Student, and Undergraduate Student, respectively, Department of Mechanical Engineering,University of California,Berkeley, CA 94720-1740.Search for other works by this author on:PT Jones,PT Jones2DiCon Fiber Optics, Inc.,1331 Eighth Street, Berkeley, CA 94710.Search for other works by this author on:M-T Wu,M-T Wu1Professor, Graduate Student, and Undergraduate Student, respectively, Department of Mechanical Engineering,University of California,Berkeley, CA 94720-1740.Search for other works by this author on:T HondaT Honda1Professor, Graduate Student, and Undergraduate Student, respectively, Department of Mechanical Engineering,University of California,Berkeley, CA 94720-1740.Search for other works by this author on:
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Thermomechanical Characterization of Nickel-Titanium Copper Shape Memory Alloy FilmsByKP Seward,KP Seward1Lawrence Livermore National Laboratory, PO Box 808, L-223,Livermore, CA 94550.Search for other works by this author on:PB Ramsey,PB Ramsey1Lawrence Livermore National Laboratory, PO Box 808, L-223,Livermore, CA 94550.Search for other works by this author on:P KrulevitchP Krulevitch1Lawrence Livermore National Laboratory, PO Box 808, L-223,Livermore, CA 94550.Search for other works by this author on:
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Deformation and Stability of Gold/Polysilicon Layered MEMS Plate Structures Subjected to Thermal LoadingByML Dunn,ML Dunn1Associate professor, Department of Mechanical Engineering,University of Colorado at Boulder.Search for other works by this author on:Y Zhang,Y Zhang2Graduate student, Department of Mechanical Engineering,University of Colorado at Boulder.Search for other works by this author on:VM BrightVM Bright3Associate professor, Department of Mechanical Engineering,University of Colorado at Boulder.Search for other works by this author on:
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The Effects of Radiation on the Mechanical Properties of Polysilicon and Polydiamond Thin FilmsByRL Newton,RL Newton1Materials Engineer, ED 36A,NASA Marshall Space Flight Center,Huntsville, AL 35812.Search for other works by this author on:JL DavidsonJL Davidson2Professor, Department of Electrical and Computer Engineering,Vanderbilt University,Nashville, TN 37235.Search for other works by this author on:
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All rights reserved. This material may not be reproduced or copied, in whole or in part, in any printed, mechanical, electronic, film, or other distribution and storage media, without the written consent of the publisher.
© 2001
ASTM International
