Skip Nav Destination
ASTM Selected Technical Papers
Semiconductor Fabrication: Technology and Metrology
By
ISBN-10:
0-8031-1273-4
ISBN:
978-0-8031-1273-5
No. of Pages:
485
Publisher:
ASTM International
Publication date:
1989
eBook Chapter
Particulate Cleanliness Testing of Filters and Equipment in Process Fluids
By
SH Goldsmith
,
SH Goldsmith
1Susan H. Goldsmith is
Director of Engineering
, and George P. Grundelman is President
of Inter Basic Resources, Inc.
727 W. Ellsworth Rd. Ann Arbor, MI 48108
.
Search for other works by this author on:
GP Grundelman
GP Grundelman
1Susan H. Goldsmith is
Director of Engineering
, and George P. Grundelman is President
of Inter Basic Resources, Inc.
727 W. Ellsworth Rd. Ann Arbor, MI 48108
.
Search for other works by this author on:
Page Count:
8
-
Published:1989
Citation
Goldsmith, S, & Grundelman, G. "Particulate Cleanliness Testing of Filters and Equipment in Process Fluids." Semiconductor Fabrication: Technology and Metrology. Ed. Gupta, D. 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959 : ASTM International, 1989.
Download citation file:
Filters and equipment components used in critical semiconductor process lines must be accurately evaluated for particulate cleanliness. This requires accurate test methods, particle counting instruments, testing apparati, and careful analysis of data. This paper describes these criteria and how they can be applied.
References
1.
Jensen
, D.
, and Goldsmith
, S.
“Evaluation of Critical Gas-Line Filters
,” in Journal of Environmental Sciences
, Nov/Dec 1987, pp. 39-43.2.
Thorogood
, R.
, and Schwartz
, A.
, “Performance Measurement of Gas Ultrafiltration Cartridges
,” in IES 1986 Proceedings
, pp. 459-467.3.
Dillenbeck
, K.
, “Advances in Particle Counting Techniques for Semiconductor Process Chemicals
,” in Microcontamination
, 02
1987
4.
Knollenberg
, R.
, “The Importance of Media Refractive Index in Evaluating Liquid and Surface Microcontamination Measurements
”, in IES 1986 Proceedings
, pp. 501-511.5.
Van Slooten
, “Statistical Treatment of Particle Counts in Clean Gases
”, in Microcontamination
, 02
1986
.
This content is only available via PDF.
You do not currently have access to this chapter.
Email alerts
Related Chapters
Problems Associated with Submicrometre Contaminant Measurement
Semiconductor Processing
Cleaning Aluminum Heat Pipe Casings with Replacements for Ozone-Depleting Chemicals
Alternatives to Chlorofluorocarbon Fluids in the Cleaning of Oxygen and Aerospace Systems and Components
Problems and Possibilities with Bottle Sampling for Assessment of Particle Concentration
Hydraulic Failure Analysis: Fluids, Components, and System Effects
Aqueous Cleaning of Industrial and High-Purity Valves and Fittings: Process Development, Control, and Validation
Alternatives to Chlorofluorocarbon Fluids in the Cleaning of Oxygen and Aerospace Systems and Components
Related Articles
Additive and Base Oil Effects in Automatic Particle Counters
J. ASTM Int. (April,2007)
Automatic Particle Measurement Systems and Liquid-Handling Techniques for Clean Liquids
J. Test. Eval. (September,1975)
