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ASTM Selected Technical Papers
Laser Induced Damage in Optical Materials: 1987
By
HE Bennett
HE Bennett
1
Naval Weapons Center
?
China Lake, California 93555
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AH Guenther
AH Guenther
2
Air Force Weapons Laboratory
?
Kirtland Air Force Base, New Mexico 87117
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D Milam
D Milam
3
Lawrence Livermore National Laboratory
?
Livermore, California 94550
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BE Newnam
BE Newnam
4
Los Alamos National Laboratory
?
Los Alamos, New Mexico 87545
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MJ Soileau
MJ Soileau
5
University of Central Florida
?
Orlando, Florida 32816
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ISBN-10:
0-8031-4481-4
ISBN:
978-0-8031-4481-1
No. of Pages:
653
Publisher:
ASTM International
Publication date:
1988

The annealing of dielectric thin film coatings has been explored in an attempt to identify the potential benefits of this method of post deposition treatment. Single layer coatings fabricated using several different deposition techniques were annealed and subsequently characterized. All properties so determined evidenced substantial changes as a result of the annealing process. Film microstructure, optical absorption levels, and laser damage thresholds varied considerably with annealing power levels. Although oven annealing is known to improve the performance of certain types of multilayer films, significant improvements were seen only in certain films over a limited range of annealing conditions. As a consequence of this, there were changes in other important optical properties, which will be discussed as well.

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Flinn
Richard A.
and
Trojan
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, “
Engineering Materials and Their Applications
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Houghton Mifflin Co
,
Boston
,
1981
, pp 90–96.
2.
Gnanamuthu
D.S.
, “
Laser Surface Treatment
,”
Opt. Engr.
 0091-3286 Vol
19
,
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(
1980
).
3.
Lange
M.R.
,
McIver
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and
Guenther
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, “
An Initial Study of: The Inclusion Model for Repetitively Pulsed Laser Damage
,” Nat. Bur. Stand. (U.S.) Spec. Publ. 727,
1984
, pp 382–393.
4.
Temple
P.A.
,
Milam
D.
, and
Lowdermilk
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, “
C02 Laser Polishing of Fused Silica Surfaces for Increased Laser Damage Resistance at 1.06 microns
,” Nat. Bur. Stand. (U.S.) Spec. Publ. 568,
1979
, pp 229–236.
5.
Weber
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,
Stewart
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,
Exarhos
Gregory
, and
Stowell
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, “
An Investigation of Laser Polishing of Fused Silica Surfaces
,”
Nat. Bur. Stand. (U.S.) Spec. Publ.
1986
: to be published.
6.
Liu
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,
Yen
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,
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, and
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, “ ”,
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 0003-6951 
34
, 864,
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7.
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and
Calka
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, “
Modification of Pd-Si Metallic Glasses by Picosecond Laser Annealing
,”
Phys. Rev. Lett.
 0031-9007 
57
(
24
), 3081,
1986
.
8.
Weber
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,
Stewart
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and
Exarhos
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, “
An Investigation of Laser Processing of Thin Film Coatings
,” Nat. Bur. Stand. (U.S.) Spec. Publ.
1986
: to be published.
9.
Model 600 camera system from Inframetrics Inc., 12 Oak Park Dr., Bedford, MA 01730.
10.
McLachlan
Anthony D.
and
Meyer
Fred P.
, “
Temperature Dependence of the Extinction Coefficient of Fused Silica for C02 Laser Wavelengths
,”
Appl. Opt.
 0003-6935 
26
, 1728(
1987
).
11.
Tuenge
Mr.
Steve
,
Martin Marietta Aerospace
, Albuquerque, New Mexico.
12.
Pawlewlcz
Dr.
Walter T.
,
Battelle Pacific Northwest Laboratories
, P.O. Box 999, Richland, WA 99352.
13.
Thomas
Dr.
Ian
,
Lawrence Livermore Laboratory
, P.O.Box 5508, Livermore, CA 94550.
14.
Model 2320,
Varian Associates Inc., Instrument Group
, 220 Humboldt Ct., Sunnyvale, CA 94089.
15.
Arndt
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, et al
, “
Multiple Determination of the Optical Constants of Thin Film Coating Materials
,”
Appl. Opt.
 0003-6935 
23
(
20
), 3571,
1984
.
16.
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17.
Silva
Robert M.
,
Orazio
Fred D.
 Jr.
, and
Stowell
W. Kent
, “
Scatter Evaluation of Supersmooth Surfaces
,”
Solomon
Musikant
,
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”,
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,
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19.
Stewart
A.F.
and
Gallant
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, “
Ultraviolet Thin Film Coating Characterization
,” Nat. Bur. Stand. (U.S.) Spec. Publ. 727,
1984
, pp. 272–284.
20.
Stewart
Alan F.
and
Guenther
Arthur H.
, “
Laser Damage Test Results on Balzers Round Robin Thin Film Samples
,”
Appl. Opt.
 0003-6935 
23
, 3774 (
1984
).
21.
Akhtar
S.M.J.
,
Ristau
D.
, and
Ebert
J.
, “
Thermal Conductivity of Dielectric Films and Correlation to Damage Threshold at 1064nm
”,
Nt. Bur. Stand. (U.S.) Spec. Publ
,
1985
.
22.
Macleod
H.A.
and
Richmond
D.
, “
Moisture Penetration Patterns in Thin Films
”,
Thin Solid Films
 0040-6090,
37
(
1976
) 163–169.
23.
Thomas
I.M.
,
Wilder
J.G.
and
Lowdermilk
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, “
High Damage Threshold Porous Silica Antireflective Coating
”, Nt. Bur. Stand. (U.S.) Spec Publ. 727,
1984
, pp 205–210.
24.
Pawlewicz
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,
Exarhos
G.J.
and
Conaway
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, “
Structural Characterization of Ti02 Optical Coatings by Raman Spectroscopy
,”
Appl. Opt.
 0003-6935 
22
, 1837 (
1983
).
25.
Private communication with
Sam Holmes of Northrup Research and Technology Center
, One Research Park, Palos Verdes Penninsula, CA 90274 and with
Tony Lauderback of Ojai Research Corp.
, Ojai, CA.
26.
Rujkorakarn
R.
,
Hsu
L.S.
, and
She
C.Y.
, “
Crystallization of Titania Films by Thermal Annealing
,” Nat. Bur. Stand. (U.S.) Spec. Publ. 727,
1984
, pp. 253–261.
27.
S. Mallavarpu is a US Air Force National Research Council Resident Research Associate at the Air Force Weapons Laboratory. Modelling developed by Dr. Charles Carnlglia, Thin Film Designer Software Inc., Albuquerque, New Mexico.
28.
Vedam
K.
,
D'Aries
L.
and
Guenther
Arthur H.
, “
Nondestructive Depth Profiling of Transparent Thin Films by Spectroscopic Ellipsometry
,” Nat. Bur. Stand. (U.S.) Spec. Publ.
1986
: to be published.
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