Skip Nav Destination
ASTM Selected Technical Papers
Emerging Semiconductor Technology
By
DC Gupta
DC Gupta
Symposium Chairman and Co-Editor
Search for other works by this author on:
ISBN-10:
0-8031-0459-6
ISBN:
978-0-8031-0459-4
No. of Pages:
719
Publisher:
ASTM International
Publication date:
1987
eBook Chapter
Particulate Control in VLSI Gases
By
JM Davidson
,
JM Davidson
1Drs. Davidson and Ruane are
Senior Scientist and Senior Physicist
, respectively, at The BOC Group, Inc., Group Technical Center
, 100 Mountain Avenue, Murray Hill, NJ 07974
.
Search for other works by this author on:
TP Ruane
TP Ruane
1Drs. Davidson and Ruane are
Senior Scientist and Senior Physicist
, respectively, at The BOC Group, Inc., Group Technical Center
, 100 Mountain Avenue, Murray Hill, NJ 07974
.
Search for other works by this author on:
Page Count:
15
-
Published:1987
Citation
Davidson, J, & Ruane, T. "Particulate Control in VLSI Gases." Emerging Semiconductor Technology. Ed. Gupta, D. 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959 : ASTM International, 1987.
Download citation file:
Semiconductor device miniaturization has required continually decreasing levels of particulate contamination in process gases. This paper briefly reviews existing technologies for analyzing and for minimizing particles in VLSI gas streams. Recent advances and research topics in both areas are also addressed. Examples from laboratory and field evaluations of VLSI and non-VLSI systems are discussed.
References
1.
Willeke
, K.
and Liu
, B. Y.H.
, “Single Particle Optical Counters: Principles and Applications
,” in Fine Particles
, Liu
B. Y.H.
, Ed., Academic Press
, New York
, 1976
, pp. 698-729.2.
Knollenberg
, R. G.
, “The Measurement of Particle Sizes Below 0.1 Micrometers
,” presented at the 30th Annual Meeting of the Institute of Environmental Sciences
, Orlando, Florida
, 1984
, and published in the Proceedings
, Institute of Environmental Sciences
, Chicago, Illinois
.3.
Keady
, P. B.
, Quant
, F. R.
and Sem
, G.
, “Differential Mobility Particle Sizer
,” TSI Quarterly
, Vol. 9
, No. 2
, April–June 1983, pp. 3-11.4.
Fuchs
, N. A.
, “Sampling of Aerosols
,” in Atmospheric Environment
, Vol. 9
, Permagon Press
, London
, 1975
, pp. 697-707.5.
Liu
, B. Y.H.
, Pui
, D. Y.H.
and Rubow
, K. L.
, “Characteristics of Air Sampling Filter Media
,” in Aerosols in the Mining and Industrial Work Environment
, Marple
V. A.
and Liu
B. Y.H.
, Eds., Ann Arbor Science Publishers
, Ann Arbor
, 1983
, pp. 989-1083.6.
Kruger
, J.
and Frankenthal
, R. P.
, Eds., Passivity of Metals
, John Wiley & Sons
, New York
, 1978
.7.
Leidheiser
, , H.
Jr., The Corrosion of Copper, Tin and Their Alloys
, John Wiley & Sons
, New York
, 1971
.8.
Hinds
, W. C.
, Aerosol Technology
, John Wiley & Sons
, New York
, 1982
.9.
Bowling
, R. A.
, “An Analysis of Particle Adhesion on Semiconductor Surfaces
,” Journal of the Electrochemical Society
0013-4651, Vol. 132
, No. 9
, 09
1985
, pp. 2208-2214.
This content is only available via PDF.
You do not currently have access to this chapter.
Email alerts
Related Chapters
Test Methods
Consensus on Operating Practices for the Sampling and Monitoring of Feedwater and Boiler Water Chemistry in Modern Industrial Boilers (CRTD-81)
Artificial Indents as the Root Cause of Rolling Contact Fatigue Damage: Effect of Plastic Properties
Bearing and Transmission Steels Technology
Application Analysis and Experimental Study on Performance of Energy-Saving Electret Fiber
Inaugural US-EU-China Thermophysics Conference-Renewable Energy 2009 (UECTC 2009 Proceedings)
Fluid Conditioning for Servo Systems
Hydraulic System Cleanliness
Related Articles
The Design, Selection, and Application of Oil-Free Screw Compressors for Fuel Gas Service
J. Eng. Gas Turbines Power (January,1995)
Soot Modeling for Advanced Control of Diesel Engine Aftertreatment
J. Eng. Gas Turbines Power (December,2011)
A Study on Fluidized Bed-Type Particulate Filter for Diesel Engines
J. Eng. Gas Turbines Power (October,2007)
