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ASTM Selected Technical Papers
Lifetime Factors in SiliconAvailable to Purchase
By
RD Westbrook
RD Westbrook
1
Oak Ridge National Laboratory
,
Oak Ridge, Tenn. 37830
;
symposium chairman
.
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ISBN-10:
0-8031-0390-5
ISBN:
978-0-8031-0390-0
No. of Pages:
258
Publisher:
ASTM International
Publication date:
1980

For the characterization of the starting silicon material lifetime measurements were carried out very early in silicon technology. A wide variety of measurement techniques was developed, such as diffusion length measurement, the photocurrent method, and the widely used photoconductivity decay method (PCD).

As silicon technology developed, lifetime measurements for the characterization of the starting (ingot) material became less important because of the increase in the perfection and purity of the silicon. In turn, lifetime measurements for in-process control of the device fabrication became more and more important.

For the characterization of neutron transmutation doped (NTD) silicon, lifetime measurements on the ingot material have become important again because of the dependence of the lifetime on the thermal annealing process subsequent to the irradiation.

1.
Vieweg-Gutberlet
,
F. G.
,
internal report
,
Wacker-Chemie GmbH, Burghausen
, West Germany,
1961
.
2.
Runyan
,
R.
,
Silicon Semiconductor Technology
,
McGraw-Hill
,
1961
, pp. 187 ff.
3.
Vieweg-Gutberlet
,
F. G.
,
Siegesleitner
,
P. F.
, and
Stallhofer
,
M.
, this volume, pp. 183-191.
4.
Graff
,
K.
,
Pieper
,
H.
and
Goldbach
,
G.
,
Semiconductor Silicon 1973
,
Huff
H. R.
and
Burgess
R. R.
, Eds.,
Electrochemical Society
,
Princeton, N. J.
,
1973
, pp. 170 ff.
5.
Vieweg-Gutberlet
,
F. G.
and
Siegesleitner
,
P. F.
,
Semiconductor Silicon 1977
,
Huff
H. R.
and
Sirtl
E.
, Eds.,
Electrochemical Society
,
Princeton, N. J.
,
1977
, pp. 360 ff.
6.
Vieweg-Gutberlet
,
F. G.
and
Siegesleitner
,
P. F.
,
Journal of the Electrochemical Society
 0013-4651, Vol.
126
, No.
10
,
10
1979
, pp. 1792-1794.
7.
Schwab
,
G.
,
Semiconductor Silicon 1977
,
Huff
H. R.
and
Sirtl
E.
, Eds.,
Electrochemical Society
,
Princeton, N. J.
,
1977
, pp. 481 ff.
8.
Reichl
,
H.
,
Ruge
,
I.
,
Eichinger
,
P.
, and
Müller
,
J. L.
, this volume, pp. 171-182.
9.
Herzer
,
H.
,
Semiconductor Silicon 1977
,
Huff
H. R.
and
Sirtl
E.
, Eds.,
Electrochemical Society
,
Princeton, N. J.
,
1977
, pp. 106 ff.
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